JPH03101518U - - Google Patents
Info
- Publication number
- JPH03101518U JPH03101518U JP986590U JP986590U JPH03101518U JP H03101518 U JPH03101518 U JP H03101518U JP 986590 U JP986590 U JP 986590U JP 986590 U JP986590 U JP 986590U JP H03101518 U JPH03101518 U JP H03101518U
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- semiconductor layer
- type semiconductor
- film transistor
- insulating substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 3
- 239000010408 film Substances 0.000 claims description 2
Landscapes
- Thin Film Transistor (AREA)
Description
第1図は、本考案の薄膜トランジスタの一実施
例を示す断面図、第2図は、従来の薄膜トランジ
スタを示す断面図である。
11……基板、12……ゲート電極、13……
ゲート絶縁膜、14……i型半導体層、15……
n型半導体層、16……ソース・ドレイン電極。
FIG. 1 is a sectional view showing an embodiment of the thin film transistor of the present invention, and FIG. 2 is a sectional view showing a conventional thin film transistor. 11...Substrate, 12...Gate electrode, 13...
Gate insulating film, 14... i-type semiconductor layer, 15...
n-type semiconductor layer, 16...source/drain electrode.
Claims (1)
型半導体層およびソース・ドレイン電極を備えた
薄膜トランジスタを絶縁基板上に複数形成した薄
膜トランジスタパネルにおいて、前記絶縁基板の
表面に凹凸を形成したことを特徴とする薄膜トラ
ンジスタパネル。 Gate electrode, gate insulating film, i-type semiconductor layer, n
1. A thin film transistor panel in which a plurality of thin film transistors each having a type semiconductor layer and a source/drain electrode are formed on an insulating substrate, the thin film transistor panel comprising a surface of the insulating substrate having irregularities formed therein.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP986590U JPH03101518U (en) | 1990-02-05 | 1990-02-05 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP986590U JPH03101518U (en) | 1990-02-05 | 1990-02-05 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH03101518U true JPH03101518U (en) | 1991-10-23 |
Family
ID=31513451
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP986590U Pending JPH03101518U (en) | 1990-02-05 | 1990-02-05 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH03101518U (en) |
-
1990
- 1990-02-05 JP JP986590U patent/JPH03101518U/ja active Pending