JPH0284646A - Method for stripping film and jig therefor - Google Patents

Abstract

PURPOSE:To gradually and uniformly strip a film and to facilitate the stripping by a mechanical means such as robot by adhering an annular temporary frame having flexibility to the jig and stripping the film by holding a part of this frame. CONSTITUTION:An adhesive tape 7 is stuck to the point to be stripped of the nitrocellulose film formed on a glass substrate 5 by a spin coating method, etc., in such a manner that the tape protrudes from the peripheral edge. A lug 9 on one side of the stripping jig 8 which consists of the frame 2 and is coated with an adhesive agent 10 on the circumference of one surface is held by the robot 11 and is carried over to the substrate. The jig is then placed on the nitrocellulose film by directing the side coated with the adhesive agent downward in such a manner that the one lug 9 projects from the adhesive tape 7. The jig is adhered to the film in such a manner. The lug 9 on the side projecting from the adhesive tape 7 is then gripped by the robot and is stripped at a specified rate. The stripping is uniformly executed at the right and left adhered points orthogonal with the stripping direction simply in this way by gripping one point of the jig and stripping the jig.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application This invention relates to a method for peeling off a film formed on a substrate and a jig used in the method.

BACKGROUND OF THE INVENTION In recent years, protective films such as pellicles have been installed on photomasks, reticles, etc. (hereinafter simply referred to as masks) for the purpose of protecting mask pattern surfaces and preventing foreign matter such as dust from adhering. The pellicle is usually manufactured by forming a film on a substrate using a spin cord method, etc., then peeling it off and attaching it to one side of the pellicle frame. A wide adhesive tape was applied to the periphery of the membrane in a grid pattern, and the adhesive tape was picked and carefully peeled off by hand. Then, the adhesive tape on the side after peeling was grabbed and pasted onto a pellicle frame whose side edges were coated with adhesive.However, since the film was thin, when peeling, it was necessary to move at a constant speed and in a direction perpendicular to the peeling direction. If the film is not peeled off uniformly at each part, it tends to stretch locally and break, and it is not easy to peel off the film uniformly at a constant speed to avoid tearing. Moreover, when the membrane is attached to the pellicle frame, it is easy for the membrane surface to fall, or for local tension or loosening to occur. It wasn't easy.

The method for manufacturing the protective film is to form a separation membrane on a substrate using a material capable of blue gel conversion, then form a thin film on top of it, and then soak it in hot water to convert the separation membrane into a blue gel. A method of floating it, then scooping it out of warm water with a frame, heating it, and drying it (Japanese Patent Laid-Open No. 59-1827)
No. 30), after forming a coating film on the substrate, a frame coated with adhesive is placed on top of the coating, the bonded frame is immersed in water to separate the substrate and the film, and then the frame with the film fixed is removed from the water. Methods such as pulling and drying (Japanese Unexamined Patent Publication No. 60-237450) have been proposed, but these methods require drying after being recovered from water, and in cases where the membrane is water-soluble or the membrane surface is coated with water-soluble substances. It cannot be applied to surfaces that have been treated, and it floats in water! Ill! If the former method is used, in which the film is scooped up using a frame, wrinkles or loosening may occur on the film surface.

Problems to be Solved by the Invention The first invention was made for the purpose of solving the above-mentioned problems, and involves bonding an annular flexible temporary frame to a film formed on a substrate. The membrane can be peeled off gradually and uniformly from the adhesive parts on both the left and right sides by grasping and peeling a part of it, and the membrane can be peeled off at a constant speed by making it easier to peel off using mechanical means such as a robot. Furthermore, by placing the membrane on a temporary frame, it is possible to support the membrane so that the surface is flat and does not ripple.

Means for Solving the Problems Therefore, the first invention presses a peeling jig consisting of a flexible circular, rectangular, polygonal, etc. annular frame coated with adhesive onto a thin film to be applied on a substrate, and The 'a film is peeled off from the substrate by gluing the jig and the thin film and then grasping a portion of the thin film and peeling it off from the substrate.

When grasping the jig, it is possible to grasp any part of the periphery of the jig that protrudes laterally from the substrate, but preferably, the jig has an integrally formed or fixed recessed part such as a lug, a handle, or a recess. It is desirable to grasp this by doing so.

The method of the present invention can be applied to protective films attached to masks as a typical example of application, but it can be similarly applied to thin films in other fields.

Action When a part of the peeling jig is peeled off from the substrate, the peeling jig is bent in a cantilever shape and peeled off from the substrate, and the film is gradually pulled away from the peripheral edges on both the left and right sides to which the peeling jig is attached. stripped.

Problems to be Solved by the Invention When peeling off a film coated on a substrate, it is important to peel from the edge of the substrate; if you try to peel from the inside of the edge of the substrate, a vacuum will be created between the substrate and the film. Relatively strong force is required, and when air enters and the vacuum state is released, rapid peeling occurs, resulting in damage to the film and a tendency to cause cracks.

When peeling using the above peeling jig, the adhesive is applied as described above and pressed/adhered to the thin film on the substrate, but depending on the adhesive location and the viscosity of the adhesive, the peeling Even when the jig is pressed, the adhesive may not spread to the end surface of the substrate, and therefore, in this case, peeling is performed from the inside of the end surface of the substrate, making the above-mentioned problem more likely to occur. It is possible to apply adhesive to the periphery of the peeling jig, or apply an adhesive with good fluidity so that when the jig is pressed, the adhesive will spread sufficiently to the end surface. However, in this case, the adhesive often comes to protrude from the end face, and it becomes necessary to use strong force to stick to the end face of the substrate and peel it off. Therefore, rapid peeling occurs and the film is likely to be damaged. Therefore, when gluing jigs, it is necessary to align and bond so that the adhesive reaches the edge and does not protrude beyond this, but such alignment is extremely delicate and difficult. be.

The second invention aims to solve the above-mentioned problem and provide a method that can reliably peel off the thin film from the end surface even if the attachment point of the jig to the substrate coated with the thin film is slightly misaligned. be.

According to the second aspect of the invention, an adhesive tape is pasted on the peripheral edge of the thin film coated on the substrate at the point where it starts to be peeled off so that it protrudes from the substrate, and then the adhesive is applied to improve the visibility. A peeling jig consisting of an annular frame is wrapped around the adhesive tape and pressed onto the thin film coated on the substrate to form an adhesive. After that, grasp a part of the peeling jig that protrudes outside the adhesive tape and pull it away from the substrate. A method of peeling a thin film from a substrate by peeling is provided.

Problems to be Solved by the Invention In each of the above inventions, the peeling jig used is made flexible because if it is made of a rigid body, peeling will occur over the entire surface of the film at once; This is because the membrane is easily damaged due to the strong force required. However, it is not preferable for a jig to have high elasticity and fly easily, but conversely, it is not preferable if the jig has low elasticity and is difficult to bend.

If the jig is highly elastic and bends easily, when a robot is used to grab and carry a part of the jig, the free end will droop and cannot be placed on the film on the substrate, causing the bonded area to shift or damage the entire jig. In addition, when adhering a thin film that has peeled off from the substrate after adhering a jig to the frame in the next process, the jig may be distorted or loosened due to the bending of the jig. - If the Yuzen strength is low and it is difficult to bend, the membrane cannot be peeled off continuously and tends to be intermittent, resulting in a direction perpendicular to the direction of peeling. This tends to result in a film with many creases.

A third object of the present invention is to provide a jig for film peeling that has appropriate visibility and does not cause the above-mentioned problems.

Solution to the Problem As a result of various experiments, the inventor found that the Young's modulus was 15.0.
00-35. (1 (10 kir/c+m2, bending properties of 50 to 120 g)) It was concluded that a material with a change of about 10 CIQ is suitable for handling without causing damage to the membrane.

Here, the bending property means that the inner diameter is 18 mm as shown in Figure 4.
0 mmφ, outer diameter 220 ms+φ, length 300I1m up to the ears l protruding from both sides, and thickness 1.51. As shown in FIG. 5, one ear 1 is One end of the thread 3, which is fixed and has a length of 600n++w, is connected to the other ear 1, and the other end is pulled on the vertical line of the fixed point as shown in FIG. 6, so that the deflection at point a is 100.
It refers to the tension in mm.

Embodiment As shown in FIGS. 1 and 2, first, a nitrocellulose film 6 formed on a glass substrate 5 by a spin cord method or the like is coated with a film having a width of 20 (1) Iw and a length of 10 to 1 (10
Adhesive tape 7 of mm is pasted so as to protrude from the periphery. Then, on top of that, frame 2 as shown in the 4th song.
A robot (part of which is indicated by reference numeral 11) grasps the lug 9 on one side of the peeling jig 8 on which the adhesive 1o has been applied on one circumference, and carries it over to the substrate where the adhesive is applied. The tape is placed on the nitrocellulose membrane with the side facing downward, with one tab 9 protruding from the adhesive tape 7, and bonded. Thereafter, the edge 9 on the side that protrudes from the adhesive tape 7 is grabbed by the robot and peeled off at a constant speed (FIG. 3).

When peeling according to this example was performed 150 times, the number of times ff1ll could be peeled off without tearing the nitrocellulose membrane was 145 times, and the success rate was 96.7%.

Incidentally, when peeling was performed in the same manner as in the above example without using adhesive tape, the number of successful peels was 2 for 100 peels.
After five attempts, the success rate was only 25%.

In this example, the peeling jig has a Young's modulus of 15.0.
00~35.000kg/am2, bendability 50~12
A material of 0 g/l Ocm is used. According to this method, a nitrocellulose membrane with folds in the direction perpendicular to the peeling direction is not obtained, and the nitrocellulose membrane that is peeled off and supported by a jig has one end of the jig shaped like a cantilever. Even if it is supported by a frame, it has a flat shape, which makes it easy to handle when it is stretched over a frame in the next process.

Next, a comparative example using a peeling jig made of materials other than those mentioned above will be shown below.

Comparative Example 1 Young's modulus 40.000 kg/cm2, bending properties 1501
A nitrocellulose film with a thickness of 2.65μ was formed on a glass substrate using a metal jig of 1/IOCIm.
When the film was peeled off at a speed of n+/see, the film could not be peeled off continuously and the film was peeled off intermittently.
As a result, a film with many folds perpendicular to the peeling direction was obtained.

Comparative example 2゜Young's modulus 5000kg/c+m2, bending properties 20g/1
When using a 0cm synthetic resin jig, when one ear of the jig was inspected and the robot carried it, the free end drooped and the bonding position shifted, and the entire body could not be bonded tightly to the film on the substrate. This also resulted in poor handling, such as difficulty in stretching the material to the frame for the next process.

Effects of the Invention According to the first invention, the peeling jig is annular and flexible;
If you grab a portion and pull it off, it bends in a cantilever shape and peels off, so you can gradually peel it off, and even thin films that tend to tear if you pull them too hard can be peeled off without tearing. By simply grasping one part of the jig and peeling it off, it is possible to perform uniform release on the left and right adhesion points perpendicular to the peeling direction, and it is relatively uniform on each part without having to peel off from multiple places at the same time. Since the film can be peeled off in a straight line, local loosening or tension is unlikely to occur on the film surface, and the film that is peeled off from the substrate and adhered to the jig, and supported, remains flat unless the jig is twisted or bent. It is easy to handle because it is maintained in a good condition and does not wrinkle or loosen.Furthermore, because of the above points, peeling can be done by mechanical means such as robots, which not only saves labor but also improves work efficiency, and at a constant speed. The film can be easily peeled off and the film is less prone to peeling.

According to the second invention, there is no need to accurately align and bond the peeling jig so that the adhesive is applied to the edge of the substrate, and the peeling jig is simply attached to the adhesive tape adhered to the peeling start position. By simply placing the film properly on the substrate and adhering it, it is possible to peel off the film only from the end face even if the position is slightly shifted.As a result, the damage to the film during peeling is greatly reduced and the yield is improved. improves.

According to the third aspect of the invention, the peeling jig has appropriate flexibility so that the membrane can be peeled off continuously, and it is easy to handle because it does not bend too much.

[Brief explanation of the drawing]

FIG. 1 is a plan view of a peeling jig bonded to a film on a substrate, FIG. 2 is a sectional view of the same, and FIG. 3 is a sectional view of the same when peeled off. Figures 4 to 6 are diagrams showing the test method for the bending properties of the peeling jig. Figure 4 is a plan view of the test piece, Figure 5 is before tension,
FIG. 6 is a sectional view showing the state after tension. 5.Glass base material/nitrocellulose membrane 7.Adhesive tape 8 Peeling jig 9.Mitide Betsujin Mitsui Petrochemical Industries, Ltd.

Claims (4)

[Claims] (1) Press a peeling jig consisting of a flexible annular frame coated with adhesive onto the thin film to be applied on the substrate, adhere the thin film to the jig, and then grab a part of it and remove it from the substrate. A method for peeling a film, characterized in that the thin film is peeled off from a substrate by peeling. (2) The method for peeling off a film according to claim 1, wherein the jig is provided with a gripping part such as a lug, a handle, or a pick that projects laterally or upwardly from the substrate. (3) Adhesive tape is pasted on the peripheral edge of the thin film applied to the substrate at the point where peeling is to begin so that it protrudes from the substrate, and then a peeling jig consisting of a flexible annular frame coated with adhesive is used. The thin film is removed from the substrate by pressing it onto the thin film applied to the substrate like an adhesive tape and adhering it, then grasping a part of the peeling jig that protrudes outside the adhesive tape and peeling it off from the substrate. A method for peeling a film characterized by: (4) A jig for peeling off a film formed on a substrate, with a Young's modulus of 15,000 to 35,000 kg/c
m^2, a peeling jig consisting of an annular frame with bending properties of 50 to 120 g/10 cm, which is adhered to a film formed on a substrate by applying adhesive on one side.