JP2673987B2 - Film peeling method - Google Patents
Film peeling methodInfo
- Publication number
- JP2673987B2 JP2673987B2 JP13435887A JP13435887A JP2673987B2 JP 2673987 B2 JP2673987 B2 JP 2673987B2 JP 13435887 A JP13435887 A JP 13435887A JP 13435887 A JP13435887 A JP 13435887A JP 2673987 B2 JP2673987 B2 JP 2673987B2
- Authority
- JP
- Japan
- Prior art keywords
- peeling
- film
- substrate
- jig
- adhesive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Description
【発明の詳細な説明】
産業上の利用分野
この発明は基板上に製膜された膜を引剥す方法及びそ
の方法で使用する治具に関する。
従来技術
近年フォトマスクやレチクル等（以下単にマスクとい
う）にマスクパターン面の保護や塵埃等の異物が付着す
るのを防止する目的でペリクルに代表される保護膜の設
置がなされつゝある。ペリクルの製法は通常、基板上に
スピンコート法等によって製膜したのちこれを剥してペ
リクル枠の一側面に張設することにより行われ、基板よ
り膜を剥離するには従来は伸びの少ない巾広の粘着テー
プを膜の周縁に井桁状に貼付し、一側より粘着テープを
摘んで手作業にて慎重に引剥していた。そして剥離後両
側の粘着テープを掴み、側端面に接着剤を塗布したペリ
クル枠に被せ貼着していたが、膜は薄いために剥離する
際、一定速度でかつ剥離方向と直交する方向の各部で均
一に剥さないと局部的に膜が伸びて破傷し易く、破れを
生じないように一定速度で均一に剥離するのは容易でな
かった。しかも膜をペリクル枠に貼着したときには膜面
に皺ができたり、局部的な引きつりや弛みが生じ易く、
膜面を平らにして波立つことのないように膜を支持して
取付けることは容易でなかった。特開昭58−196501号に
は、基板上に製膜した膜に閉リング又は枠体を接着して
剥離する方法が開示されている。
保護膜の製法として、基板上にゾル−ゲル変換が可能
な材料で分離膜を形成し、その上に更に薄膜を形成した
のち温水中に浸漬し、分離膜をゾル−ゲル変換させて薄
膜を温水中に浮上させ、次いでこれを枠により温水中か
ら掬い上げて加熱、乾燥する方法（特開昭59−182730
号）、基板上に塗膜を形成したのちこの上より接着剤を
塗布した枠を載せて接着したものを水中に浸漬して基板
と膜を分離し、次いで膜を固着した枠を水中より引上げ
乾燥する方法（特開昭60−237450号）なども提案されて
いるが、いづれも水中から回収したのちに乾燥が必要で
あるうえ膜が水溶性である場合や膜表面を水溶性物質で
表面処理したものには適用することができず、しかも水
中に浮遊する薄膜を枠によって掬い上げる前者の方法に
よる場合ことに膜面にしわができたり、弛みが生じ易
い。
発明が解決しようとする問題点
基板上に塗布された膜を剥す際には基板端面より剥す
ことが重要で、基板端面の内側より剥離しようとすると
基板と膜との間が真空状態となるため比較的強い力を要
し、空気が入って真空状態が解消されたときに急激な剥
離を生じ、その結果膜を損傷し亀裂を生じ易い。
上述の閉リング又は枠体よりなる剥離治具を用いて剥
離する場合には、接着剤を塗布して基板上の薄膜に押し
当てゝ接着するが、接着剤の接着箇所や接着剤の粘性に
よっては、剥離治具を押付けても接着剤が基板端面まで
押し拡がらないことがあり、したがってこの場合、引剥
しが基板端面の内側より行われ、上記問題が生じ易くな
る。接着剤を剥離治具の周縁寄りに塗布したり、或いは
流動性の良好な接着剤を塗布して治具を押し当てたとき
接着剤を端面にまで十分に行き渡らせるようにすること
は可能であるが、この場合、往々にして接着剤が端面に
はみ出るようになり、基板端面にくっ付いて引剥すのに
強い力を要するようになる。そのため急激な剥離を生じ
膜を損傷し易い。したがって治具を接着するに当っては
接着剤が端面際まで達し、しかもこれよりはみ出ること
のないように位置合せをして接着しなければならない
が、こうした位置合せは非常に微妙であり困難である。
本発明は上記の問題を解消し、薄膜を塗布した基板上
への治具の接着箇所が多少ずれていても薄膜を端面から
確実に剥離することができる方法を提供しようとするも
のである。
問題点の解決手段
本発明によればそのため基板上に塗布された薄膜の周
縁部における引剥がし開始箇所に接着テープを基板より
はみ出すようにして貼付し、ついで接着剤を塗布した可
撓性を有する環状枠よりなる剥離治具を接着テープにか
ゝるようにして基板に製膜された薄膜上に押し当てゝ接
着したのち接着テープ外側に突出する剥離治具の一部を
掴み、基板より引剥すことにより薄膜を基板より剥離す
る方法が提供される。
本発明において、使用される剥離治具を可撓性とした
のは、剛体で形成すると引剥すとき剥離が膜全面に亘っ
て一度で行われ、引剥しに強い力を要するため膜が破傷
し易いためであるが、治具は弾力性が大で撓み易くても
逆に弾力性が小さくて撓み難くても好ましくない。弾性
性が大で撓み易いと、ロボットを使用して治具の一部を
掴み持ち運びする際、自由端が垂れ下がって基板上の膜
にうまく載せることができず、接着箇所がずれたり、全
体をうまく接着することができなかったりし、また治具
を接着させて基板上より剥離した薄膜を次工程を枠に接
着する際、治具の撓みに伴って捩れたり弛みを生じたり
し、枠にうまく張設することができないなどハンドリン
グ悪化をもたらす。一方弾力性が少なく撓み難いと、膜
の引剥しが連続的に行えないので断続的となる傾向があ
り、そのため剥離方法と直交する方向に折り目が多数付
された膜が得られがちとなる。
本発明者は種々実験を重ねた結果、ヤング率が15、00
0〜35、000kg/cm2、曲げ特性が50〜120g/10cm程度の材
質のものが膜に傷を生じさせないでハンドリングにも適
するという結論に到達した。
ここで曲げ特性とは、第４図に示すように、内径が18
0mmφ、外径が220mmφ、両側に突出形成した耳１までの
長さ300mm、厚さ1.5mmの円環状をなす枠２において、第
５図に示すようにその一方の耳１を固定し、かつ長さ60
0mmの糸３の一端を他方の耳１に連結するとともに他端
を第６図に示すように、固定点の鉛直線上で引張り、ａ
点での撓みが100mmとなる張力をいう。
実施例
第１、２図に示すように、先ずガラス基板５上にスピ
ンコート法等によって製膜したニトロセルロース膜６上
の引剥がし箇所に幅20mm、長さ10〜100mmの接着テープ
７を周縁よりはみ出すようにして貼付する。ついでその
うえより第４図に示されるような枠２よりなり、接着剤
10を一面の円周上に塗布した剥離治具８の一側の耳９を
ロボット（その一部を符号11で示す）により掴んで、基
板上まで持ち運び接着剤の塗布される側を下向きにして
ニトロセルロース膜上に一方の耳９が接着テープ７より
突き出るようにして置き接着する。その後接着テープ７
より突き出る側の耳９をロボットにより掴み一定速度で
引剥す（第３図）。
本実施例による剥離を150回行ったところニトロセル
ロース膜が破れることなく剥離することのできた回数は
145回で、成功率は96.7％であった。因みに接着テープ
を使用しないで上記実施例と同様にして剥離を行ったと
ころ100回の剥離に対し成功数は25回で、成功率は25％
に過ぎなかった。
なお本実施例において、剥離治具はヤング率が15、00
0〜35、000kg/cm2、曲げ性が50〜120g/10cmの材質のも
のが使用される。これによれば剥離方向と直交する方向
に折り目の入ったニトロセルロース膜が得られることも
なく、また剥離され、四囲を治具により支持されるニト
ロセルロース膜は治具の一端が片持ばり状に支持されて
いてもほゞ平面状をなし、そのため次工程の枠に被せ張
設する際のハンドリングが容易であった。
次に上記材質以外の剥離治具を使用した比較例を以下
に示す。
比較例1.
ヤング率40、000kg/cm2、曲げ特性150g/10cmの金属製
治具を用いてガラス基板上に製膜された厚さ2.65μのニ
トロセルロース膜を10mm/secの速度で引剥したところ、
膜の引剥しが連続的に行えず、断続的に引剥されるよう
な状態となり、そのため剥離方向に直角の折り目が多数
入った膜が得られた。
比較例2.
ヤング率5000kg/cm2、曲げ特性20g/10cmの合成樹脂製
治具を使用したところ、治具の一方の耳を掴んでロボッ
トで持ち運びする際、自由端が垂れ下がって接着位置が
ずれたり、基板上の膜に全体をぴったりと接着できなか
ったりし、また次工程の枠へ張設するのもうまくできな
い等のハンドリング悪化をもたらした。
発明の効果
本発明によれば、剥離治具を環状で可撓性を有し、一
部を掴んで引剥せば片持ばり状に撓んで剥離するので、
剥離を徐々に行うことができ、一度に強く引剥すと破れ
易いような薄膜でも破れることなく引剥すことができる
こと、接着テープ外側に突出する治具の一部を掴んで引
剥すだけで剥離方向と直交する左右の接着箇所で剥離を
均一に行うことができ、同時に複数箇所より引剥さなく
ても各部で比較的均一に剥離することができるため膜面
に局部的な弛みや引きつりが生じにくいと、基板より剥
取られて治具に接着し、支持される膜は治具が捩れたり
撓んだりしないかぎり平面状態に維持され、皺や弛みが
生じないためハンドリングが容易であること、更には以
上の点によりロボットなど機械的手段による剥離が可能
となるため省力化はもとより作業能率も向上し、しかも
一定速度での剥離が容易に行えるようになって膜に破れ
を生じにくいこと、剥離治具を接着剤が基板端面に一致
するように正確に位置合せをして接着する必要がなく、
単に引剥し開始位置に接着された接着テープにかゝるよ
うに基板上に適当に置いて接着するだけで位置が多少ず
れていても端面からの膜引剥しが可能となり、その結果
引剥し時における膜の破傷が大巾に少なくなって歩留り
が向上することなどの効果を有する。Description: TECHNICAL FIELD The present invention relates to a method for peeling a film formed on a substrate and a jig used in the method. 2. Description of the Related Art In recent years, a protective film typified by a pellicle has been installed for the purpose of protecting a mask pattern surface and preventing foreign matter such as dust from adhering to a photomask, a reticle, etc. (hereinafter simply referred to as a mask). The pellicle is usually manufactured by spin-coating a film on the substrate, peeling it off, and stretching it on one side of the pellicle frame. A wide adhesive tape was attached to the periphery of the film in a cross beam shape, and the adhesive tape was picked from one side and carefully peeled off by hand. After peeling, the adhesive tape on both sides was gripped, and the side end face was covered and attached to the pellicle frame, but since the film is thin, at the time of peeling, it is a constant speed and each part in the direction orthogonal to the peeling direction. If it is not uniformly peeled off, the film is locally stretched and is easily damaged, and it is not easy to peel uniformly at a constant speed so as not to break. Moreover, when the film is attached to the pellicle frame, wrinkles are easily formed on the film surface, and local drag and slack are likely to occur.
It was not easy to support and attach the membrane so that the surface of the membrane was flat and wavy. Japanese Unexamined Patent Publication (Kokai) No. 58-196501 discloses a method of adhering and closing a closing ring or a frame to a film formed on a substrate. As a method for producing a protective film, a separation film is formed on a substrate using a material capable of sol-gel conversion, and a thin film is further formed on the separation film and then immersed in warm water, and the separation film is sol-gel converted to form a thin film. A method of floating in warm water, then scooping it from the warm water with a frame, heating and drying (JP-A-59-182730).
No.), after forming a coating film on the substrate, put a frame coated with an adhesive from above and soak the bonded product in water to separate the substrate and film, and then pull up the frame to which the film is fixed from water. Methods such as drying (Japanese Patent Laid-Open No. 60-237450) have also been proposed, but it is necessary to dry them after collecting them from water, and if the membrane is water-soluble or if the membrane surface is coated with a water-soluble substance. It cannot be applied to the treated product, and moreover, the former method of scooping a thin film floating in water by a frame tends to cause wrinkles and looseness on the film surface. Problems to be Solved by the Invention When peeling off a film applied on a substrate, it is important to peel it off from the end face of the substrate, and when trying to peel from the inside of the end face of the substrate, a vacuum state is created between the substrate and the film. Relatively strong force is required, and when air enters and the vacuum state is released, rapid peeling occurs, and as a result, the film is likely to be damaged and cracked. When peeling using a peeling jig consisting of the above-mentioned closing ring or frame, apply an adhesive and press it against the thin film on the substrate to bond, but depending on the adhesive location and the viscosity of the adhesive. In some cases, even if the peeling jig is pressed, the adhesive agent may not spread to the end surface of the substrate. Therefore, in this case, the peeling is performed from the inside of the end surface of the substrate, and the above-mentioned problem is likely to occur. It is possible to apply the adhesive near the periphery of the peeling jig, or to apply an adhesive with good fluidity so that when the jig is pressed, the adhesive can be sufficiently spread to the end surface. However, in this case, the adhesive often comes out to the end face, and a strong force is required to stick to the end face of the substrate and peel it off. Therefore, rapid peeling occurs and the film is easily damaged. Therefore, when bonding the jig, it is necessary to align and bond the adhesive so that the adhesive does not reach the end face and does not protrude beyond this, but such alignment is extremely delicate and difficult. is there. The present invention is intended to solve the above problems and to provide a method capable of reliably peeling a thin film from an end face even if a bonding position of a jig on a substrate coated with the thin film is slightly deviated. Solution to Problem According to the present invention, therefore, an adhesive tape is attached to the peeling start position in the peripheral portion of the thin film applied on the substrate so as to protrude from the substrate, and then the adhesive is applied, which is flexible. The peeling jig consisting of a ring frame is pressed against the adhesive tape so that it adheres to the thin film formed on the substrate, and then a part of the peeling jig protruding to the outside of the adhesive tape is grasped and pulled from the substrate. There is provided a method of peeling a thin film from a substrate by peeling. In the present invention, the peeling jig used is made flexible because when it is formed of a rigid body, peeling is performed once over the entire surface of the film and a strong force is required for peeling the film. However, it is not preferable that the jig has a large elasticity and easily bends, but on the contrary, the jig has a small elasticity and is difficult to bend. When the robot is used to grab a part of the jig and carry it around, the free end hangs down so that it cannot be placed on the film on the substrate well, and the adhesive spot is displaced It may not be possible to bond well, or when the jig is bonded and the thin film peeled from the substrate is bonded to the frame in the next step, it may be twisted or loosened due to the bending of the jig, It causes poor handling, such as not being able to stretch it well. On the other hand, if the film has low elasticity and is difficult to bend, the film cannot be peeled off continuously, so that the film tends to be intermittent, and therefore a film having many folds in the direction orthogonal to the peeling method tends to be obtained. As a result of various experiments, the present inventors found that the Young's modulus was 15,000.
It was concluded that a material with a bending property of 0 to 35,000 kg / cm 2 and a bending property of 50 to 120 g / 10 cm is suitable for handling without causing scratches on the film. Here, the bending property means that the inner diameter is 18 as shown in FIG.
In an annular frame 2 having a diameter of 0 mmφ, an outer diameter of 220 mmφ, a length of 300 mm up to the ears 1 formed on both sides and a thickness of 1.5 mm, one ear 1 is fixed as shown in FIG. 5, and Length 60
Connect one end of the 0 mm thread 3 to the other ear 1 and pull the other end on the vertical line of the fixed point as shown in FIG.
The tension at which the deflection at a point becomes 100 mm. Example As shown in FIGS. 1 and 2, first, an adhesive tape 7 having a width of 20 mm and a length of 10 to 100 mm was formed on the periphery of a nitrocellulose film 6 formed on a glass substrate 5 by a spin coating method or the like at a peeling position. Stick it so that it sticks out more. Then, the frame 2 as shown in FIG.
The ear 9 on one side of the peeling jig 8 coated with 10 on the circumference of one surface is grasped by a robot (a part of which is shown by reference numeral 11) and carried to the substrate so that the side to which the adhesive is applied faces downward. Then, one ear 9 is placed on the nitrocellulose film so that it sticks out from the adhesive tape 7 and is bonded. Then adhesive tape 7
The ear 9 on the more protruding side is grasped by a robot and peeled off at a constant speed (Fig. 3). When the peeling according to the present example was performed 150 times, the number of times the nitrocellulose film could be peeled without tearing was found.
After 145 times, the success rate was 96.7%. By the way, when peeling was performed in the same manner as the above example without using the adhesive tape, the number of successes was 25 for 100 times of peeling, and the success rate was 25%.
It was only. In this example, the peeling jig had a Young's modulus of 15,000.
A material with 0 to 35,000 kg / cm 2 and bendability of 50 to 120 g / 10 cm is used. According to this, a nitrocellulose membrane having a crease in a direction orthogonal to the peeling direction cannot be obtained, and a nitrocellulose membrane that is peeled off and supported by a jig on four sides has a cantilevered shape at one end of the jig. Even if it was supported by, it had a nearly flat shape, and therefore it was easy to handle when it was stretched over the frame in the next step. Next, a comparative example using a peeling jig other than the above materials will be shown below. Comparative Example 1. Using a metal jig having a Young's modulus of 40,000 kg / cm 2 and a bending property of 150 g / 10 cm, a 2.65 μ-thick nitrocellulose film formed on a glass substrate was pulled at a speed of 10 mm / sec. When peeled off,
The film could not be peeled off continuously, and the film was peeled off intermittently. Therefore, a film having many folds perpendicular to the peeling direction was obtained. Comparative Example 2. When a synthetic resin jig with a Young's modulus of 5000 kg / cm 2 and a bending property of 20 g / 10 cm was used, when the robot was carried by grasping one ear of the jig, the free end drooped and the bonding position was It caused misalignment, it was not possible to adhere the whole film to the film on the substrate exactly, and it could not be attached to the frame of the next process well, resulting in poor handling. EFFECT OF THE INVENTION According to the present invention, the peeling jig has a ring-like flexibility, and if a portion of the peeling jig is gripped and peeled off, the peeling jig bends into a cantilever shape and peels off.
Peeling can be done gradually, and even a thin film that is easy to tear if strongly peeled at once can be peeled without tearing.Peeling direction can be obtained by simply grasping and peeling a part of the jig protruding to the outside of the adhesive tape Peeling can be performed uniformly at the left and right bonding points that intersect at right angles with each other, and it is possible to peel relatively uniformly at each part without peeling from multiple points at the same time, so there is no local slack or dragging on the film surface. If it does not easily occur, it will be peeled off from the substrate and adhered to the jig, and the supported film will be maintained in a flat state unless the jig is twisted or bent, and wrinkles and slack will not occur, so handling is easy. Moreover, because of the above points, peeling by a mechanical means such as a robot is possible, which not only saves labor, but also improves work efficiency, and facilitates peeling at a constant speed so that tearing of the film does not occur easily. Adhesive peeling jig is not necessary to adhere to the precisely aligned to match the substrate end face,
Even if the position is slightly shifted, the film can be peeled from the end surface by simply placing and adhering it properly on the substrate like the adhesive tape adhered to the peeling start position. This has the effect of greatly reducing the number of film ruptures and improving the yield.
【図面の簡単な説明】
第１図は製膜された基板上の膜に剥離治具を接着した平
面図、第２図は同断面図、第３図は引剥し時の断面図で
ある。第４〜６図は剥離治具の曲げ特性の試験方法を示
す図で、第４図は試験片の平面図、第５図は引張り前、
第６図は引張後の状態を示す断面図である。
５……ガラス基板、６……ニトロセルロース膜
７……接着テープ、８……剥離治具、９……耳BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a plan view in which a peeling jig is bonded to a film formed on a substrate, FIG. 2 is the same sectional view, and FIG. 3 is a sectional view at the time of peeling. 4 to 6 are views showing a method for testing the bending characteristics of the peeling jig. FIG. 4 is a plan view of the test piece, FIG.
FIG. 6 is a sectional view showing a state after being pulled. 5 ... Glass substrate, 6 ... Nitrocellulose film 7 ... Adhesive tape, 8 ... Peeling jig, 9 ... Ear
Claims (1)
始箇所に接着テープを基板よりはみ出すようにして貼付
し、ついで接着剤を塗布した可撓性を有する環状枠より
なる剥離治具を接着テープにかゝるようにして基板に製
膜された薄膜上に押し当てゝ接着したのち、接着テープ
外側に突出する剥離治具の一部を掴み、基板より引き剥
がすことにより薄膜を基板より剥離するようにしたこと
を特徴とする膜の引剥がし方法。 ２．上記剥離治具は、ヤング率が15、000〜35、000Kg/c
m2、曲げ特性が50〜120g/10cmの環状枠よりなる特許請
求の範囲第１項記載の膜の引剥がし方法。(57) [Claims] Adhesive tape is attached to the peeling start point in the peripheral portion of the thin film formed on the substrate so that it protrudes from the substrate, and then a peeling jig consisting of a flexible annular frame coated with adhesive is applied to the adhesive tape. After pressing and adhering on the thin film formed on the substrate in this way, grasp a part of the peeling jig protruding to the outside of the adhesive tape and peel it off from the substrate to peel off the thin film from the substrate. A method for peeling a film, characterized in that 2. The peeling jig has a Young's modulus of 15,000 to 35,000 Kg / c
The film peeling method according to claim 1, which comprises an annular frame having m 2 and a bending property of 50 to 120 g / 10 cm.
Priority Applications (11)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13435887A JP2673987B2 (en) | 1987-05-28 | 1987-05-28 | Film peeling method |
| US07/197,964 US4828640A (en) | 1987-05-28 | 1988-05-24 | Method of producing films using a peeling jig |
| CA000567814A CA1300857C (en) | 1987-05-28 | 1988-05-26 | Method of producing films and jig for producing the same |
| AT88304851T ATE96235T1 (en) | 1987-05-28 | 1988-05-27 | FILM MAKING PROCESS AND ADJUSTMENT DEVICE FOR IT. |
| AT92112828T ATE168789T1 (en) | 1987-05-28 | 1988-05-27 | FILM PRODUCTION METHOD AND ADJUSTING DEVICE THEREOF |
| DE3856223T DE3856223T2 (en) | 1987-05-28 | 1988-05-27 | Film production method and setting device therefor |
| EP88304851A EP0293239B1 (en) | 1987-05-28 | 1988-05-27 | Method of producing films and jig for producing the same |
| EP92112828A EP0513859B1 (en) | 1987-05-28 | 1988-05-27 | Method of producing films and jig for producing the same |
| DE88304851T DE3885003T2 (en) | 1987-05-28 | 1988-05-27 | Film production method and setting device therefor. |
| KR1019880006360A KR960016311B1 (en) | 1987-05-28 | 1988-05-28 | Method for producing films and jig for producing the same |
| CA000616276A CA1320070C (en) | 1987-05-28 | 1992-01-08 | Method of producing films and jig for producing the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13435887A JP2673987B2 (en) | 1987-05-28 | 1987-05-28 | Film peeling method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0284646A JPH0284646A (en) | 1990-03-26 |
| JP2673987B2 true JP2673987B2 (en) | 1997-11-05 |
Family
ID=15126502
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13435887A Expired - Fee Related JP2673987B2 (en) | 1987-05-28 | 1987-05-28 | Film peeling method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2673987B2 (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006133305A (en) * | 2004-11-02 | 2006-05-25 | Asahi Kasei Electronics Co Ltd | Device for peeling large pellicle |
| JP2006146064A (en) * | 2004-11-24 | 2006-06-08 | Asahi Kasei Electronics Co Ltd | Temporary frame for stripping large pellicle |
| JP4999634B2 (en) * | 2007-05-08 | 2012-08-15 | 松下精機株式会社 | Pecryl peeling apparatus and method |
| JP5776266B2 (en) * | 2011-03-29 | 2015-09-09 | 大日本印刷株式会社 | Imprint method and imprint apparatus for implementing the method |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4453828A (en) * | 1981-12-02 | 1984-06-12 | Advanced Semiconductor Products, Inc. | Apparatus and methods for measuring the optical thickness and index of refraction of thin, optical membranes |
-
1987
- 1987-05-28 JP JP13435887A patent/JP2673987B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0284646A (en) | 1990-03-26 |
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|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |