JPH028356Y2 - - Google Patents
Info
- Publication number
- JPH028356Y2 JPH028356Y2 JP2901784U JP2901784U JPH028356Y2 JP H028356 Y2 JPH028356 Y2 JP H028356Y2 JP 2901784 U JP2901784 U JP 2901784U JP 2901784 U JP2901784 U JP 2901784U JP H028356 Y2 JPH028356 Y2 JP H028356Y2
- Authority
- JP
- Japan
- Prior art keywords
- deflection
- electron beam
- display
- sample
- angle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010894 electron beam technology Methods 0.000 claims description 39
- 238000003384 imaging method Methods 0.000 claims description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000003491 array Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2901784U JPS60141059U (ja) | 1984-02-29 | 1984-02-29 | 電子顕微鏡等の電子線偏向角表示装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2901784U JPS60141059U (ja) | 1984-02-29 | 1984-02-29 | 電子顕微鏡等の電子線偏向角表示装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60141059U JPS60141059U (ja) | 1985-09-18 |
| JPH028356Y2 true JPH028356Y2 (cs) | 1990-02-28 |
Family
ID=30527442
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2901784U Granted JPS60141059U (ja) | 1984-02-29 | 1984-02-29 | 電子顕微鏡等の電子線偏向角表示装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60141059U (cs) |
-
1984
- 1984-02-29 JP JP2901784U patent/JPS60141059U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60141059U (ja) | 1985-09-18 |
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