JPH028294Y2 - - Google Patents
Info
- Publication number
- JPH028294Y2 JPH028294Y2 JP15136080U JP15136080U JPH028294Y2 JP H028294 Y2 JPH028294 Y2 JP H028294Y2 JP 15136080 U JP15136080 U JP 15136080U JP 15136080 U JP15136080 U JP 15136080U JP H028294 Y2 JPH028294 Y2 JP H028294Y2
- Authority
- JP
- Japan
- Prior art keywords
- automatic developing
- upper cover
- plate
- developing device
- spray nozzle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000011161 development Methods 0.000 claims description 9
- 239000007921 spray Substances 0.000 claims description 9
- 239000007788 liquid Substances 0.000 claims description 4
- 238000007664 blowing Methods 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 claims 1
- 238000000034 method Methods 0.000 description 8
- 238000001035 drying Methods 0.000 description 6
- 239000003595 mist Substances 0.000 description 3
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- 238000011017 operating method Methods 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15136080U JPH028294Y2 (OSRAM) | 1980-10-22 | 1980-10-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15136080U JPH028294Y2 (OSRAM) | 1980-10-22 | 1980-10-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5774439U JPS5774439U (OSRAM) | 1982-05-08 |
| JPH028294Y2 true JPH028294Y2 (OSRAM) | 1990-02-27 |
Family
ID=29510698
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15136080U Expired JPH028294Y2 (OSRAM) | 1980-10-22 | 1980-10-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH028294Y2 (OSRAM) |
-
1980
- 1980-10-22 JP JP15136080U patent/JPH028294Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5774439U (OSRAM) | 1982-05-08 |
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