JPH027920B2 - - Google Patents
Info
- Publication number
- JPH027920B2 JPH027920B2 JP10020180A JP10020180A JPH027920B2 JP H027920 B2 JPH027920 B2 JP H027920B2 JP 10020180 A JP10020180 A JP 10020180A JP 10020180 A JP10020180 A JP 10020180A JP H027920 B2 JPH027920 B2 JP H027920B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- growth
- ingaasp
- ingaas
- inp
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 claims description 26
- 238000000034 method Methods 0.000 claims description 7
- 239000007791 liquid phase Substances 0.000 claims description 6
- 239000013078 crystal Substances 0.000 claims description 4
- 238000001816 cooling Methods 0.000 description 8
- 239000000758 substrate Substances 0.000 description 7
- 238000000098 azimuthal photoelectron diffraction Methods 0.000 description 6
- 230000007704 transition Effects 0.000 description 6
- 238000009792 diffusion process Methods 0.000 description 5
- 239000012535 impurity Substances 0.000 description 4
- 230000031700 light absorption Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 102000020897 Formins Human genes 0.000 description 1
- 108091022623 Formins Proteins 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000001000 micrograph Methods 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000010583 slow cooling Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10020180A JPS5728000A (en) | 1980-07-22 | 1980-07-22 | Liquid phase epitaxial growing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10020180A JPS5728000A (en) | 1980-07-22 | 1980-07-22 | Liquid phase epitaxial growing method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5728000A JPS5728000A (en) | 1982-02-15 |
| JPH027920B2 true JPH027920B2 (enrdf_load_stackoverflow) | 1990-02-21 |
Family
ID=14267681
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10020180A Granted JPS5728000A (en) | 1980-07-22 | 1980-07-22 | Liquid phase epitaxial growing method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5728000A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4888300A (en) * | 1985-11-07 | 1989-12-19 | Fairchild Camera And Instrument Corporation | Submerged wall isolation of silicon islands |
-
1980
- 1980-07-22 JP JP10020180A patent/JPS5728000A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5728000A (en) | 1982-02-15 |