JPH02717U - - Google Patents

Info

Publication number
JPH02717U
JPH02717U JP7715688U JP7715688U JPH02717U JP H02717 U JPH02717 U JP H02717U JP 7715688 U JP7715688 U JP 7715688U JP 7715688 U JP7715688 U JP 7715688U JP H02717 U JPH02717 U JP H02717U
Authority
JP
Japan
Prior art keywords
chuck
holding member
exposed
holding
gas suction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7715688U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0519948Y2 (enrdf_load_html_response
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7715688U priority Critical patent/JPH0519948Y2/ja
Publication of JPH02717U publication Critical patent/JPH02717U/ja
Application granted granted Critical
Publication of JPH0519948Y2 publication Critical patent/JPH0519948Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Details Of Measuring And Other Instruments (AREA)
JP7715688U 1988-06-10 1988-06-10 Expired - Lifetime JPH0519948Y2 (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7715688U JPH0519948Y2 (enrdf_load_html_response) 1988-06-10 1988-06-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7715688U JPH0519948Y2 (enrdf_load_html_response) 1988-06-10 1988-06-10

Publications (2)

Publication Number Publication Date
JPH02717U true JPH02717U (enrdf_load_html_response) 1990-01-05
JPH0519948Y2 JPH0519948Y2 (enrdf_load_html_response) 1993-05-25

Family

ID=31302151

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7715688U Expired - Lifetime JPH0519948Y2 (enrdf_load_html_response) 1988-06-10 1988-06-10

Country Status (1)

Country Link
JP (1) JPH0519948Y2 (enrdf_load_html_response)

Also Published As

Publication number Publication date
JPH0519948Y2 (enrdf_load_html_response) 1993-05-25

Similar Documents

Publication Publication Date Title
KR100277109B1 (ko) 주사노광장치 및 이를 사용한 소자제조공정
JPH07115057A (ja) 位置決めステージ装置
CA1206629A (en) Device for photolithographically treating a thin substrate
US4999506A (en) Positioning mechanism
EP0376160A3 (en) Wafer positioning mechanisms for notched wafers
EP0360272A3 (en) Stepper for circuit pattern formation
JPH02717U (enrdf_load_html_response)
JP4072212B2 (ja) 走査露光装置
US4248508A (en) Projection mask storage and carrier system
JPS5990926A (ja) 局部的真空エンベロプを組み込んだ荷電粒子ビ−ムリソグラフイ装置
SU911439A1 (ru) Устройство дл совмещени масок и подложек микросхемы
JPH07122624A (ja) ウェハのプリアライメント装置
JPH0529442A (ja) テ−ブル装置
JPH02202031A (ja) 回動テーブル装置
JPH0624882U (ja) チャック装置
JPH0517874Y2 (enrdf_load_html_response)
JPH01261836A (ja) ワイヤボンディング装置
JPH02110915A (ja) ウエハ露光用ステッパー
JPH0610671Y2 (ja) 移動テ−ブル装置
JPS6454335U (enrdf_load_html_response)
JPS6378092A (ja) 回転テ−ブル
JPH03204651A (ja) 露光装置
JPH02110953A (ja) 高精度位置決め方法
JPH01193133A (ja) 微動ステージ
JPH0338714Y2 (enrdf_load_html_response)