JPH0271211U - - Google Patents

Info

Publication number
JPH0271211U
JPH0271211U JP15061288U JP15061288U JPH0271211U JP H0271211 U JPH0271211 U JP H0271211U JP 15061288 U JP15061288 U JP 15061288U JP 15061288 U JP15061288 U JP 15061288U JP H0271211 U JPH0271211 U JP H0271211U
Authority
JP
Japan
Prior art keywords
light
reflected
optical path
pair
path system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15061288U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15061288U priority Critical patent/JPH0271211U/ja
Publication of JPH0271211U publication Critical patent/JPH0271211U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
  • Measurement Of Optical Distance (AREA)
JP15061288U 1988-11-18 1988-11-18 Pending JPH0271211U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15061288U JPH0271211U (enExample) 1988-11-18 1988-11-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15061288U JPH0271211U (enExample) 1988-11-18 1988-11-18

Publications (1)

Publication Number Publication Date
JPH0271211U true JPH0271211U (enExample) 1990-05-30

Family

ID=31423914

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15061288U Pending JPH0271211U (enExample) 1988-11-18 1988-11-18

Country Status (1)

Country Link
JP (1) JPH0271211U (enExample)

Similar Documents

Publication Publication Date Title
US4558949A (en) Horizontal position detecting device
JPS59136725A (ja) オ−バヘツドプロジエクタ
GR3003610T3 (enExample)
JPS5760205A (en) Exposure be electron beam
US5636189A (en) Astigmatic method for detecting a focussing error in an optical pickup system
JPS57176017A (en) Spectral microscope device using optical fiber
JPH01157423U (enExample)
JPS63193842U (enExample)
JPH0311218U (enExample)
JPH05297278A (ja) レーザー光照射用光学装置
JPH0431728Y2 (enExample)
JPH0781820B2 (ja) 微小変位測定顕微鏡
JPS6321854B2 (enExample)
JPS56152249A (en) Image pickup device for inspection
JPH037880Y2 (enExample)
JPS58147821A (ja) 光学式ヘツド
JPH03171614A (ja) 照明光学系
JPH01158904U (enExample)
JPH0210361B2 (enExample)
JPS6384726U (enExample)
JPS6410391U (enExample)
JPS6391825U (enExample)
JPS59109009A (ja) 焦点ずれ検出方法
JPS6338974A (ja) ホログラム作成方法
JPS61235090A (ja) レ−ザ加工装置