JPH01157423U - - Google Patents
Info
- Publication number
- JPH01157423U JPH01157423U JP4740488U JP4740488U JPH01157423U JP H01157423 U JPH01157423 U JP H01157423U JP 4740488 U JP4740488 U JP 4740488U JP 4740488 U JP4740488 U JP 4740488U JP H01157423 U JPH01157423 U JP H01157423U
- Authority
- JP
- Japan
- Prior art keywords
- light
- height detector
- height
- imaging means
- optical path
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 claims description 6
- 238000003384 imaging method Methods 0.000 claims description 4
- 230000003287 optical effect Effects 0.000 claims 2
- 239000002245 particle Substances 0.000 claims 1
- 238000002039 particle-beam lithography Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000000609 electron-beam lithography Methods 0.000 description 1
Landscapes
- Electron Beam Exposure (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Measurement Of Optical Distance (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4740488U JPH01157423U (enExample) | 1988-04-07 | 1988-04-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4740488U JPH01157423U (enExample) | 1988-04-07 | 1988-04-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01157423U true JPH01157423U (enExample) | 1989-10-30 |
Family
ID=31273614
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4740488U Pending JPH01157423U (enExample) | 1988-04-07 | 1988-04-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01157423U (enExample) |
-
1988
- 1988-04-07 JP JP4740488U patent/JPH01157423U/ja active Pending
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