JPH0270435U - - Google Patents
Info
- Publication number
- JPH0270435U JPH0270435U JP15025988U JP15025988U JPH0270435U JP H0270435 U JPH0270435 U JP H0270435U JP 15025988 U JP15025988 U JP 15025988U JP 15025988 U JP15025988 U JP 15025988U JP H0270435 U JPH0270435 U JP H0270435U
- Authority
- JP
- Japan
- Prior art keywords
- metal layer
- layer
- oxidation
- electrode structure
- back surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910052751 metal Inorganic materials 0.000 claims 6
- 239000002184 metal Substances 0.000 claims 6
- 239000000853 adhesive Substances 0.000 claims 2
- 230000001070 adhesive effect Effects 0.000 claims 2
- 239000013078 crystal Substances 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical group [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- 229910052804 chromium Inorganic materials 0.000 claims 1
- 239000011651 chromium Substances 0.000 claims 1
- 229910052802 copper Inorganic materials 0.000 claims 1
- 239000010949 copper Substances 0.000 claims 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical group [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims 1
- 239000010931 gold Substances 0.000 claims 1
- 229910052737 gold Inorganic materials 0.000 claims 1
- 239000008188 pellet Substances 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
Description
第１図は本考案を説明する為の断面図、第２図
は従来例を説明する為の断面図である。
FIG. 1 is a sectional view for explaining the present invention, and FIG. 2 is a sectional view for explaining a conventional example.
Claims (1)
属層が複数層被着され、次いで接着用金属層、酸
化防止金属層が順次積層されたことを特徴とする
半導体ベレツトの裏面電極構造。 (2) 前記柱状結晶を成す金属層はクロム層、前
記接着用金属層は銅層、前記酸化防止金属層は金
層であることを特徴とする請求項第１項に記載の
半導体ペレツトの裏面電極構造。[Claims for Utility Model Registration] (1) A plurality of metal layers forming columnar crystals are deposited on the back surface of a silicon substrate, and then an adhesive metal layer and an oxidation-preventing metal layer are sequentially laminated. Back electrode structure of semiconductor beret. (2) The back surface of the semiconductor pellet according to claim 1, wherein the metal layer forming columnar crystals is a chromium layer, the adhesive metal layer is a copper layer, and the oxidation-preventing metal layer is a gold layer. Electrode structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15025988U JPH0270435U (en) | 1988-11-17 | 1988-11-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15025988U JPH0270435U (en) | 1988-11-17 | 1988-11-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0270435U true JPH0270435U (en) | 1990-05-29 |
Family
ID=31423242
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15025988U Pending JPH0270435U (en) | 1988-11-17 | 1988-11-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0270435U (en) |
-
1988
- 1988-11-17 JP JP15025988U patent/JPH0270435U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS60160554U (en) | Bonding thin wire for semiconductors | |
| JPH0270435U (en) | ||
| JPH0183331U (en) | ||
| JPS59164236U (en) | vapor deposition mask | |
| JPS6268267U (en) | ||
| JPS63165865U (en) | ||
| JPH03101572U (en) | ||
| JPS6112260U (en) | Semiconductor laser array device | |
| JPS59117149U (en) | Beam lead type semiconductor device | |
| JPS6127348U (en) | bonding pad electrode | |
| JPS61199043U (en) | ||
| JPS636742U (en) | ||
| JPH0369230U (en) | ||
| JPS62163945U (en) | ||
| JPS63178359U (en) | ||
| JPS62147357U (en) | ||
| JPS6268254U (en) | ||
| JPH029439U (en) | ||
| JPS6398662U (en) | ||
| JPS6329958U (en) | ||
| JPS6197868U (en) | ||
| JPH0310531U (en) | ||
| JPH0239468U (en) | ||
| JPS6186957U (en) | ||
| JPH01154633U (en) |