JPH0269692A - 荷電粒子ビームのエネルギーの球状ミラー分析器 - Google Patents
荷電粒子ビームのエネルギーの球状ミラー分析器Info
- Publication number
- JPH0269692A JPH0269692A JP1185843A JP18584389A JPH0269692A JP H0269692 A JPH0269692 A JP H0269692A JP 1185843 A JP1185843 A JP 1185843A JP 18584389 A JP18584389 A JP 18584389A JP H0269692 A JPH0269692 A JP H0269692A
- Authority
- JP
- Japan
- Prior art keywords
- charged particle
- energy
- spherical
- particle beam
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/29—Measurement performed on radiation beams, e.g. position or section of the beam; Measurement of spatial distribution of radiation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
- H01J49/46—Static spectrometers
- H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
- H01J49/484—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with spherical mirrors
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Physics & Mathematics (AREA)
- High Energy & Nuclear Physics (AREA)
- Molecular Biology (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Measurement Of Radiation (AREA)
- Electron Tubes For Measurement (AREA)
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SU4463270 | 1988-07-18 | ||
SU4463270 | 1988-07-18 | ||
SU4478794 | 1988-09-05 | ||
SU4478794 | 1988-09-05 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0269692A true JPH0269692A (ja) | 1990-03-08 |
JPH0581875B2 JPH0581875B2 (enrdf_load_stackoverflow) | 1993-11-16 |
Family
ID=26666180
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1185843A Granted JPH0269692A (ja) | 1988-07-18 | 1989-07-18 | 荷電粒子ビームのエネルギーの球状ミラー分析器 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JPH0269692A (enrdf_load_stackoverflow) |
DE (1) | DE3913043C2 (enrdf_load_stackoverflow) |
FR (1) | FR2634286B1 (enrdf_load_stackoverflow) |
GB (1) | GB2221082B (enrdf_load_stackoverflow) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5032723A (en) * | 1989-03-24 | 1991-07-16 | Tosoh Corporation | Charged particle energy analyzer |
GB2244369A (en) * | 1990-05-22 | 1991-11-27 | Kratos Analytical Ltd | Charged particle energy analysers |
US5962850A (en) * | 1998-03-04 | 1999-10-05 | Southwest Research Institute | Large aperture particle detector with integrated antenna |
CN109142409B (zh) * | 2018-10-15 | 2023-10-27 | 中国科学院高能物理研究所 | 高、低温环境中材料二次电子特性参数的测量装置和方法 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB8322017D0 (en) * | 1983-08-16 | 1983-09-21 | Vg Instr Ltd | Charged particle energy spectrometer |
-
1989
- 1989-04-13 FR FR8904924A patent/FR2634286B1/fr not_active Expired - Fee Related
- 1989-04-14 GB GB8908504A patent/GB2221082B/en not_active Expired - Fee Related
- 1989-04-20 DE DE19893913043 patent/DE3913043C2/de not_active Expired - Fee Related
- 1989-07-18 JP JP1185843A patent/JPH0269692A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
DE3913043A1 (de) | 1990-01-25 |
GB2221082B (en) | 1992-09-23 |
JPH0581875B2 (enrdf_load_stackoverflow) | 1993-11-16 |
FR2634286A1 (fr) | 1990-01-19 |
DE3913043C2 (de) | 1994-11-24 |
GB2221082A (en) | 1990-01-24 |
GB8908504D0 (en) | 1989-06-01 |
FR2634286B1 (fr) | 1993-10-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US5055679A (en) | Surface analysis method and apparatus | |
Leckey | Recent developments in electron energy analysers | |
US20130126727A1 (en) | Time-of-Flight Electron Energy Analyzer | |
JPS6369135A (ja) | 電子検出装置 | |
Reddish et al. | Dual toroidal photoelectron spectrometer for investigating photodouble ionization in atoms and molecules | |
Graczyk et al. | Scanning electron diffraction attachment with electron energy filtering | |
JP2019035744A (ja) | 透過型荷電粒子顕微鏡における回折パターン検出 | |
US4358680A (en) | Charged particle spectrometers | |
JPH09167591A (ja) | 走査透過電子顕微鏡 | |
US3670172A (en) | Charged particle generating and utilizing | |
JPH0269692A (ja) | 荷電粒子ビームのエネルギーの球状ミラー分析器 | |
JP2588833B2 (ja) | 分析電子顕微鏡 | |
JPH08148116A (ja) | 顕微レーザ飛行時間型質量分析計 | |
JP2947440B2 (ja) | 電子エネルギ損失同時計測装置 | |
US20070029479A1 (en) | Method for SEM measurement of features using magnetically filtered low loss electron microscopy | |
JP2764505B2 (ja) | 電子分光方法とこれを用いた電子分光装置 | |
Van Boeyen et al. | Multidetection (e, 2e) electron spectrometer | |
JP3392550B2 (ja) | 荷電粒子線の偏向角測定方法及び荷電粒子線装置 | |
US4806754A (en) | High luminosity spherical analyzer for charged particles | |
JP3353488B2 (ja) | イオン散乱分光装置 | |
JPH07153410A (ja) | 荷電粒子ビーム装置 | |
CN111727489A (zh) | 动量分辨光电子能谱仪及用于动量分辨光电子能谱的方法 | |
JPH05109379A (ja) | 走査型反射電子顕微鏡 | |
JPH0636730A (ja) | 荷電ビーム装置 | |
JP2001116847A (ja) | X線検出装置、元素分析装置および半導体製造装置 |