JPH0267643U - - Google Patents
Info
- Publication number
- JPH0267643U JPH0267643U JP14701088U JP14701088U JPH0267643U JP H0267643 U JPH0267643 U JP H0267643U JP 14701088 U JP14701088 U JP 14701088U JP 14701088 U JP14701088 U JP 14701088U JP H0267643 U JPH0267643 U JP H0267643U
- Authority
- JP
- Japan
- Prior art keywords
- probe card
- connector section
- measuring needle
- connector
- card plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000523 sample Substances 0.000 claims description 12
- 239000004065 semiconductor Substances 0.000 claims 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Measuring Leads Or Probes (AREA)
Description
第１図は本考案の一実施例を示す上面図、第２
図はその要部を示す断面図、第３図は従来例の上
面図、第４図は従来例の要部を示す断面図である
。
１：プローブカード用板体、２：端子、３：端
部、４：プローバ接続用コネクタ、５：プローブ
カード用コネクタ、６：測定針、７：対向部材、
８：スプリング。
Fig. 1 is a top view showing one embodiment of the present invention;
3 is a top view of the conventional example, and FIG. 4 is a sectional view showing the important parts of the conventional example. 1: Probe card plate, 2: Terminal, 3: End, 4: Prober connection connector, 5: Probe card connector, 6: Measuring needle, 7: Opposing member,
8: Spring.
Claims (1)
ブカード用板体に設置する測定針と、この測定針
を囲むプローブカード用板体に形成する端子と、
前記プローブカード用板体端部に設置するプロー
バー接続用コネクター部と、このプローバー接続
用コネクター部に電気的に接続してプローブカー
ド用板体に設置するプローブカード用コネクター
部と、このプローブカード用コネクター部と前記
端子間を電気的に結ぶ配線層と、前記測定針によ
り前記プローブカード用コネクター部と電気的に
結ばれた被測定半導体素子と、両コネクター部間
を跨いで設置し、伸縮自在な対向部材からなるコ
ネクター部とを具備し、前記測定針とプローバ接
続用コネクター部間の距離を調整可能にすること
を特徴とするプローブカード。 An insulating probe card plate, a measuring needle installed on the probe card plate, and a terminal formed on the probe card plate surrounding the measuring needle,
A probe card connector section installed at the end of the probe card plate; a probe card connector section electrically connected to the probe card connector section and installed on the probe card plate; A wiring layer that electrically connects the connector portion and the terminal, a semiconductor element to be measured that is electrically connected to the probe card connector portion by the measuring needle, and is installed across both connector portions and is expandable and retractable. 1. A probe card, comprising: a connector section made of a facing member, and the distance between the measuring needle and the prober connection connector section can be adjusted.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14701088U JPH0267643U (en) | 1988-11-10 | 1988-11-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14701088U JPH0267643U (en) | 1988-11-10 | 1988-11-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0267643U true JPH0267643U (en) | 1990-05-22 |
Family
ID=31417030
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14701088U Pending JPH0267643U (en) | 1988-11-10 | 1988-11-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0267643U (en) |
-
1988
- 1988-11-10 JP JP14701088U patent/JPH0267643U/ja active Pending
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