JPS60139276U - probe card - Google Patents

probe card

Info

Publication number
JPS60139276U
JPS60139276U JP2657684U JP2657684U JPS60139276U JP S60139276 U JPS60139276 U JP S60139276U JP 2657684 U JP2657684 U JP 2657684U JP 2657684 U JP2657684 U JP 2657684U JP S60139276 U JPS60139276 U JP S60139276U
Authority
JP
Japan
Prior art keywords
probe card
inclined surface
central opening
probes
integrated circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2657684U
Other languages
Japanese (ja)
Other versions
JPH0432616Y2 (en
Inventor
昌男 大久保
吉光　康良
Original Assignee
日本電子材料株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電子材料株式会社 filed Critical 日本電子材料株式会社
Priority to JP2657684U priority Critical patent/JPS60139276U/en
Publication of JPS60139276U publication Critical patent/JPS60139276U/en
Application granted granted Critical
Publication of JPH0432616Y2 publication Critical patent/JPH0432616Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は従来のプローブカードの一実施例を示す断面側
面図、第２図は本考案の一実施例を示す要部断面側面図
である。 １０・・・・・・プローブカード本体、１１・・・・・
・中央開口部、１２・・・・・・絶縁リング、１３・・
・・・・傾斜面、１６・・・・・・探針、１７・・・・
・・同軸ケーブル。FIG. 1 is a cross-sectional side view showing an embodiment of a conventional probe card, and FIG. 2 is a cross-sectional side view of essential parts of an embodiment of the present invention. 10... Probe card body, 11...
・Central opening, 12...Insulation ring, 13...
... Slanted surface, 16 ... Probe, 17 ...
··coaxial cable.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 集積回路と測定装置とを電気的に接続する略等しい長さ
に設定された複数本の同軸ケーブルと、プローブカード
本体の中央開口部側に取り付けられた絶縁リングの傾斜
面上に放射状に配設された略等しい長さに設定された複
数本の探針とを、前−２配給縁リングの傾斜面上で接続
したことを特徴と−するプローブカード。Multiple coaxial cables of approximately equal length electrically connect the integrated circuit and the measurement device, and are arranged radially on the inclined surface of the insulating ring attached to the central opening side of the probe card body. A probe card characterized in that a plurality of probes having substantially equal lengths are connected on an inclined surface of a front two distribution edge ring.
JP2657684U 1984-02-24 1984-02-24 probe card Granted JPS60139276U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2657684U JPS60139276U (en) 1984-02-24 1984-02-24 probe card

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2657684U JPS60139276U (en) 1984-02-24 1984-02-24 probe card

Publications (2)

Publication Number Publication Date
JPS60139276U true JPS60139276U (en) 1985-09-14
JPH0432616Y2 JPH0432616Y2 (en) 1992-08-05

Family

ID=30522710

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2657684U Granted JPS60139276U (en) 1984-02-24 1984-02-24 probe card

Country Status (1)

Country Link
JP (1) JPS60139276U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0363932U (en) * 1987-10-13 1991-06-21
JP2013250145A (en) * 2012-05-31 2013-12-12 Tokyo Cathode Laboratory Co Ltd Probe card

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5574047U (en) * 1978-11-13 1980-05-21
JPS5853762A (en) * 1981-09-28 1983-03-30 Seiichiro Sogo Test probe assembly

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5574047U (en) * 1978-11-13 1980-05-21
JPS5853762A (en) * 1981-09-28 1983-03-30 Seiichiro Sogo Test probe assembly

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0363932U (en) * 1987-10-13 1991-06-21
JP2013250145A (en) * 2012-05-31 2013-12-12 Tokyo Cathode Laboratory Co Ltd Probe card
TWI572865B (en) * 2012-05-31 2017-03-01 Ｓｖ探針私人有限公司 Probe card

Also Published As

Publication number Publication date
JPH0432616Y2 (en) 1992-08-05

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