JPH0265224A - Ｘ線マスクの製造方法 - Google Patents

Ｘ線マスクの製造方法

Info

Publication number
JPH0265224A
JPH0265224A JP63217727A JP21772788A JPH0265224A JP H0265224 A JPH0265224 A JP H0265224A JP 63217727 A JP63217727 A JP 63217727A JP 21772788 A JP21772788 A JP 21772788A JP H0265224 A JPH0265224 A JP H0265224A
Authority
JP
Japan
Prior art keywords
substrate
mask
ray
protective film
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP63217727A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0531289B2 (cs
Inventor
Satoshi Okazaki
智 岡崎
Yoshihiro Kubota
芳宏 久保田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd filed Critical Shin Etsu Chemical Co Ltd
Priority to JP63217727A priority Critical patent/JPH0265224A/ja
Publication of JPH0265224A publication Critical patent/JPH0265224A/ja
Publication of JPH0531289B2 publication Critical patent/JPH0531289B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP63217727A 1988-08-31 1988-08-31 Ｘ線マスクの製造方法 Granted JPH0265224A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63217727A JPH0265224A (ja) 1988-08-31 1988-08-31 Ｘ線マスクの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63217727A JPH0265224A (ja) 1988-08-31 1988-08-31 Ｘ線マスクの製造方法

Publications (2)

Publication Number Publication Date
JPH0265224A true JPH0265224A (ja) 1990-03-05
JPH0531289B2 JPH0531289B2 (cs) 1993-05-12

Family

ID=16708796

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63217727A Granted JPH0265224A (ja) 1988-08-31 1988-08-31 Ｘ線マスクの製造方法

Country Status (1)

Country Link
JP (1) JPH0265224A (cs)

Also Published As

Publication number Publication date
JPH0531289B2 (cs) 1993-05-12

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