JPH0263540U - - Google Patents
Info
- Publication number
- JPH0263540U JPH0263540U JP12792789U JP12792789U JPH0263540U JP H0263540 U JPH0263540 U JP H0263540U JP 12792789 U JP12792789 U JP 12792789U JP 12792789 U JP12792789 U JP 12792789U JP H0263540 U JPH0263540 U JP H0263540U
- Authority
- JP
- Japan
- Prior art keywords
- pair
- drive shaft
- driven
- wafer
- cassettes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 235000012431 wafers Nutrition 0.000 claims description 12
- 230000003028 elevating effect Effects 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims 4
- 238000010586 diagram Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989127927U JPH0311889Y2 (cs) | 1989-11-02 | 1989-11-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989127927U JPH0311889Y2 (cs) | 1989-11-02 | 1989-11-02 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0263540U true JPH0263540U (cs) | 1990-05-11 |
| JPH0311889Y2 JPH0311889Y2 (cs) | 1991-03-20 |
Family
ID=31380799
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989127927U Expired JPH0311889Y2 (cs) | 1989-11-02 | 1989-11-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0311889Y2 (cs) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5821352A (ja) * | 1981-07-29 | 1983-02-08 | Toshiba Corp | 半導体ウエハの方向決め方式 |
-
1989
- 1989-11-02 JP JP1989127927U patent/JPH0311889Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5821352A (ja) * | 1981-07-29 | 1983-02-08 | Toshiba Corp | 半導体ウエハの方向決め方式 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0311889Y2 (cs) | 1991-03-20 |
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