JPH0263531U - - Google Patents

Info

Publication number
JPH0263531U
JPH0263531U JP1988143216U JP14321688U JPH0263531U JP H0263531 U JPH0263531 U JP H0263531U JP 1988143216 U JP1988143216 U JP 1988143216U JP 14321688 U JP14321688 U JP 14321688U JP H0263531 U JPH0263531 U JP H0263531U
Authority
JP
Japan
Prior art keywords
processing chamber
wafer
ultraviolet light
ozone
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1988143216U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988143216U priority Critical patent/JPH0263531U/ja
Publication of JPH0263531U publication Critical patent/JPH0263531U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP1988143216U 1988-10-31 1988-10-31 Pending JPH0263531U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988143216U JPH0263531U (enExample) 1988-10-31 1988-10-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988143216U JPH0263531U (enExample) 1988-10-31 1988-10-31

Publications (1)

Publication Number Publication Date
JPH0263531U true JPH0263531U (enExample) 1990-05-11

Family

ID=31409837

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988143216U Pending JPH0263531U (enExample) 1988-10-31 1988-10-31

Country Status (1)

Country Link
JP (1) JPH0263531U (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006002232A (ja) * 2004-06-18 2006-01-05 Shimizu Densetsu Kogyo Kk 洗浄乾燥方法および洗浄乾燥装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006002232A (ja) * 2004-06-18 2006-01-05 Shimizu Densetsu Kogyo Kk 洗浄乾燥方法および洗浄乾燥装置

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