JPH0263443A - 超音波探触子の製造方法 - Google Patents
超音波探触子の製造方法Info
- Publication number
- JPH0263443A JPH0263443A JP1151495A JP15149589A JPH0263443A JP H0263443 A JPH0263443 A JP H0263443A JP 1151495 A JP1151495 A JP 1151495A JP 15149589 A JP15149589 A JP 15149589A JP H0263443 A JPH0263443 A JP H0263443A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric vibrator
- electrode
- vibrator plate
- matrix
- filler
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 12
- 239000000945 filler Substances 0.000 claims abstract description 14
- 239000000523 sample Substances 0.000 claims description 17
- 238000000034 method Methods 0.000 claims description 7
- 239000004020 conductor Substances 0.000 claims description 3
- 238000005520 cutting process Methods 0.000 claims description 2
- 239000011810 insulating material Substances 0.000 claims 1
- 239000000463 material Substances 0.000 abstract description 14
- 239000011159 matrix material Substances 0.000 abstract description 5
- 238000004090 dissolution Methods 0.000 abstract 1
- 230000006698 induction Effects 0.000 abstract 1
- 238000002604 ultrasonography Methods 0.000 description 10
- 239000000758 substrate Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 238000001771 vacuum deposition Methods 0.000 description 3
- 239000012777 electrically insulating material Substances 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 239000005350 fused silica glass Substances 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
- Ultra Sonic Daignosis Equipment (AREA)
- Transducers For Ultrasonic Waves (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1151495A JPH0263443A (ja) | 1989-06-13 | 1989-06-13 | 超音波探触子の製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1151495A JPH0263443A (ja) | 1989-06-13 | 1989-06-13 | 超音波探触子の製造方法 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP57066702A Division JPS58183152A (ja) | 1982-04-20 | 1982-04-20 | 超音波探触子およびその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0263443A true JPH0263443A (ja) | 1990-03-02 |
JPH0532059B2 JPH0532059B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1993-05-14 |
Family
ID=15519750
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1151495A Granted JPH0263443A (ja) | 1989-06-13 | 1989-06-13 | 超音波探触子の製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0263443A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6396198B1 (en) | 1999-06-16 | 2002-05-28 | Ngk Spark Plug Co. Ltd. | Wave transmission-reception element for use in ultrasound probe, method for manufacturing the wave transmission-reception element and ultrasound probe incorporating the transmission-reception element |
US10654071B2 (en) | 2016-03-07 | 2020-05-19 | Seiko Epson Corporation | Ultrasonic element array, ultrasonic probe, ultrasonic apparatus, and manufacturing method for ultrasonic element array |
-
1989
- 1989-06-13 JP JP1151495A patent/JPH0263443A/ja active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6396198B1 (en) | 1999-06-16 | 2002-05-28 | Ngk Spark Plug Co. Ltd. | Wave transmission-reception element for use in ultrasound probe, method for manufacturing the wave transmission-reception element and ultrasound probe incorporating the transmission-reception element |
US10654071B2 (en) | 2016-03-07 | 2020-05-19 | Seiko Epson Corporation | Ultrasonic element array, ultrasonic probe, ultrasonic apparatus, and manufacturing method for ultrasonic element array |
Also Published As
Publication number | Publication date |
---|---|
JPH0532059B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1993-05-14 |