JPH026006Y2 - - Google Patents
Info
- Publication number
- JPH026006Y2 JPH026006Y2 JP11578785U JP11578785U JPH026006Y2 JP H026006 Y2 JPH026006 Y2 JP H026006Y2 JP 11578785 U JP11578785 U JP 11578785U JP 11578785 U JP11578785 U JP 11578785U JP H026006 Y2 JPH026006 Y2 JP H026006Y2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- duct
- air
- floating
- injection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000002347 injection Methods 0.000 claims description 31
- 239000007924 injection Substances 0.000 claims description 31
- 238000007667 floating Methods 0.000 claims description 23
- 238000005339 levitation Methods 0.000 claims description 3
- 230000001141 propulsive effect Effects 0.000 claims description 3
- 230000035515 penetration Effects 0.000 claims description 2
- 239000000428 dust Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 238000011068 loading method Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 2
- 239000000696 magnetic material Substances 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
Landscapes
- Control Of Vehicles With Linear Motors And Vehicles That Are Magnetically Levitated (AREA)
- Linear Motors (AREA)
- Non-Mechanical Conveyors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11578785U JPH026006Y2 (enrdf_load_stackoverflow) | 1985-07-27 | 1985-07-27 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11578785U JPH026006Y2 (enrdf_load_stackoverflow) | 1985-07-27 | 1985-07-27 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6223231U JPS6223231U (enrdf_load_stackoverflow) | 1987-02-12 |
JPH026006Y2 true JPH026006Y2 (enrdf_load_stackoverflow) | 1990-02-14 |
Family
ID=30999770
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11578785U Expired JPH026006Y2 (enrdf_load_stackoverflow) | 1985-07-27 | 1985-07-27 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH026006Y2 (enrdf_load_stackoverflow) |
-
1985
- 1985-07-27 JP JP11578785U patent/JPH026006Y2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS6223231U (enrdf_load_stackoverflow) | 1987-02-12 |
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