JPH025818B2 - - Google Patents

Info

Publication number
JPH025818B2
JPH025818B2 JP5404781A JP5404781A JPH025818B2 JP H025818 B2 JPH025818 B2 JP H025818B2 JP 5404781 A JP5404781 A JP 5404781A JP 5404781 A JP5404781 A JP 5404781A JP H025818 B2 JPH025818 B2 JP H025818B2
Authority
JP
Japan
Prior art keywords
crystal
shielding plate
sample
evaporation
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5404781A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57169084A (en
Inventor
Toshiki Suganuma
Toshio Hayashi
Yasuo Nomura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nihon Dempa Kogyo Co Ltd
Original Assignee
Nihon Dempa Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Dempa Kogyo Co Ltd filed Critical Nihon Dempa Kogyo Co Ltd
Priority to JP5404781A priority Critical patent/JPS57169084A/ja
Publication of JPS57169084A publication Critical patent/JPS57169084A/ja
Publication of JPH025818B2 publication Critical patent/JPH025818B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/542—Controlling the film thickness or evaporation rate
    • C23C14/545—Controlling the film thickness or evaporation rate using measurement on deposited material
    • C23C14/546—Controlling the film thickness or evaporation rate using measurement on deposited material using crystal oscillators

Landscapes

  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP5404781A 1981-04-10 1981-04-10 Vacuum vapor-depositing device of crystal resonator Granted JPS57169084A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5404781A JPS57169084A (en) 1981-04-10 1981-04-10 Vacuum vapor-depositing device of crystal resonator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5404781A JPS57169084A (en) 1981-04-10 1981-04-10 Vacuum vapor-depositing device of crystal resonator

Publications (2)

Publication Number Publication Date
JPS57169084A JPS57169084A (en) 1982-10-18
JPH025818B2 true JPH025818B2 (OSRAM) 1990-02-06

Family

ID=12959685

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5404781A Granted JPS57169084A (en) 1981-04-10 1981-04-10 Vacuum vapor-depositing device of crystal resonator

Country Status (1)

Country Link
JP (1) JPS57169084A (OSRAM)

Also Published As

Publication number Publication date
JPS57169084A (en) 1982-10-18

Similar Documents

Publication Publication Date Title
JP3466607B2 (ja) スパッタリング装置
US7595089B2 (en) Deposition method for semiconductor laser bars using a clamping jig
US4588942A (en) Thickness monitoring system for intermittently exposing a quartz crystal to a material to be deposited
JPH025818B2 (OSRAM)
US5937493A (en) Method of manufacturing an electronic multilayer component
JPH021224B2 (OSRAM)
JPH021225B2 (OSRAM)
JP2002105621A (ja) 金属板とその製造方法及び露光装置
JPH021226B2 (OSRAM)
JP2002217675A (ja) 圧電振動素子の電極構造及び製造装置
JP3281926B2 (ja) 薄膜形成装置
JPS5812336B2 (ja) ジヨウチヤクマクアツソクテイホウホウ
JPS63153265A (ja) スパツタ装置
JPH09256156A (ja) 成膜装置
JPH0638111Y2 (ja) 成膜装置の試料台保持機構
JP2890686B2 (ja) レーザ・スパッタリング装置
JP2000114201A (ja) 蒸着装置
JPS5842441Y2 (ja) 蒸着装置
JPH06172998A (ja) 薄膜製造方法および装置
JPH0722348A (ja) 半導体製造装置
JPH01209810A (ja) 圧電振動子およびその周波数微調整方法
KR910006920Y1 (ko) 저항가열 진공증착장치
JPS5842268B2 (ja) ジヨウチヤクソウチ
JPS6217027B2 (OSRAM)
SU1104191A1 (ru) Устройство дл асферизации оптических деталей