JPH0256434B2 - - Google Patents
Info
- Publication number
- JPH0256434B2 JPH0256434B2 JP62270265A JP27026587A JPH0256434B2 JP H0256434 B2 JPH0256434 B2 JP H0256434B2 JP 62270265 A JP62270265 A JP 62270265A JP 27026587 A JP27026587 A JP 27026587A JP H0256434 B2 JPH0256434 B2 JP H0256434B2
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- tank
- plating
- plating solution
- diaphragm tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000007747 plating Methods 0.000 claims description 73
- 239000007788 liquid Substances 0.000 claims description 21
- 238000000034 method Methods 0.000 claims description 10
- 238000001914 filtration Methods 0.000 claims description 9
- 239000011148 porous material Substances 0.000 claims description 3
- 239000012535 impurity Substances 0.000 description 14
- 239000002244 precipitate Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000009713 electroplating Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
Landscapes
- Electroplating Methods And Accessories (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP27026587A JPH01116094A (ja) | 1987-10-28 | 1987-10-28 | 隔膜鍍金法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP27026587A JPH01116094A (ja) | 1987-10-28 | 1987-10-28 | 隔膜鍍金法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH01116094A JPH01116094A (ja) | 1989-05-09 |
JPH0256434B2 true JPH0256434B2 (fr) | 1990-11-30 |
Family
ID=17483842
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP27026587A Granted JPH01116094A (ja) | 1987-10-28 | 1987-10-28 | 隔膜鍍金法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01116094A (fr) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7022211B2 (en) | 2000-01-31 | 2006-04-04 | Ebara Corporation | Semiconductor wafer holder and electroplating system for plating a semiconductor wafer |
KR100804714B1 (ko) * | 2000-03-17 | 2008-02-18 | 가부시키가이샤 에바라 세이사꾸쇼 | 도금장치 및 방법 |
ES2574158T3 (es) * | 2005-04-26 | 2016-06-15 | Atotech Deutschland Gmbh | Baño galvánico alcalino con una membrana de filtración |
JP5257919B2 (ja) * | 2007-05-08 | 2013-08-07 | 株式会社 大昌電子 | めっき装置 |
US9421617B2 (en) | 2011-06-22 | 2016-08-23 | Tel Nexx, Inc. | Substrate holder |
JP5651737B2 (ja) * | 2013-06-03 | 2015-01-14 | 株式会社ムラタ | ニッケルめっきのためのめっき装置 |
CN106435695A (zh) * | 2016-08-24 | 2017-02-22 | 谢彪 | 电镀设备及电镀方法 |
-
1987
- 1987-10-28 JP JP27026587A patent/JPH01116094A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPH01116094A (ja) | 1989-05-09 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP3794613B2 (ja) | 電解銅箔の電解装置 | |
US4435266A (en) | Electroplating arrangements | |
US6527920B1 (en) | Copper electroplating apparatus | |
US20080105555A1 (en) | Plating Device, Plating Method, Semiconductor Device, And Method For Manufacturing Semiconductor Device | |
US6251251B1 (en) | Anode design for semiconductor deposition | |
JPH0256434B2 (fr) | ||
US4626331A (en) | Electrolytic cell employing fluidized bed | |
KR950031932A (ko) | 은 제거 방법 및 장치 | |
US2431949A (en) | Apparatus for electroplating the inside of bearing shells and the like | |
US6695962B2 (en) | Anode designs for planar metal deposits with enhanced electrolyte solution blending and process of supplying electrolyte solution using such designs | |
JP2009114530A (ja) | 電解液供給設備用の気泡混入確認装置 | |
JPS6219203A (ja) | 改良電極をもつ透析用電気フイルタ− | |
JP3277064B2 (ja) | 電着塗装装置 | |
JPH02129393A (ja) | 半導体装置の製造方法 | |
US3766039A (en) | Process for treatment of liquors using multi-compartment baths | |
JPH07173668A (ja) | 電鋳金型の製造方法 | |
JPH06280099A (ja) | めっき液の循環装置 | |
JPH0554371B2 (fr) | ||
JPS5848691A (ja) | メツキ方法 | |
JPH0781925A (ja) | 二酸化珪素被膜の製造装置 | |
JP4524430B2 (ja) | フィルター洗浄方法および装置 | |
JPS5827763Y2 (ja) | トウカマクオモチイタヨウエキノ ブンリソウチ | |
JP2701316B2 (ja) | 電鋳装置 | |
JP3971675B2 (ja) | 無電解めっき装置 | |
JP2787952B2 (ja) | 電着塗装装置 |