JPH0254937B2 - - Google Patents
Info
- Publication number
- JPH0254937B2 JPH0254937B2 JP60127358A JP12735885A JPH0254937B2 JP H0254937 B2 JPH0254937 B2 JP H0254937B2 JP 60127358 A JP60127358 A JP 60127358A JP 12735885 A JP12735885 A JP 12735885A JP H0254937 B2 JPH0254937 B2 JP H0254937B2
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- exposure
- exposure beam
- printing
- control method
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000000034 method Methods 0.000 claims description 22
- 239000000463 material Substances 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 15
- 230000015654 memory Effects 0.000 description 12
- 238000001514 detection method Methods 0.000 description 10
- 238000004033 diameter control Methods 0.000 description 4
- 230000007274 generation of a signal involved in cell-cell signaling Effects 0.000 description 4
- 230000007261 regionalization Effects 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
Landscapes
- Fax Reproducing Arrangements (AREA)
- Electron Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60127358A JPS61284992A (ja) | 1985-06-11 | 1985-06-11 | 露光ビ−ム制御方法 |
| US06/861,721 US4887225A (en) | 1985-05-24 | 1986-05-12 | Method and device for controlling exposure beams |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60127358A JPS61284992A (ja) | 1985-06-11 | 1985-06-11 | 露光ビ−ム制御方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61284992A JPS61284992A (ja) | 1986-12-15 |
| JPH0254937B2 true JPH0254937B2 (OSRAM) | 1990-11-26 |
Family
ID=14957970
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60127358A Granted JPS61284992A (ja) | 1985-05-24 | 1985-06-11 | 露光ビ−ム制御方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61284992A (OSRAM) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63164317A (ja) * | 1986-12-26 | 1988-07-07 | Matsushita Electric Ind Co Ltd | 電子線描画装置 |
| JP5397723B2 (ja) * | 2006-08-22 | 2014-01-22 | 株式会社リコー | 光走査装置 |
| US8320028B2 (en) | 2006-08-22 | 2012-11-27 | Ricoh Company, Ltd. | Optical scanning apparatus |
-
1985
- 1985-06-11 JP JP60127358A patent/JPS61284992A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61284992A (ja) | 1986-12-15 |
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