JPH0254283B2 - - Google Patents

Info

Publication number
JPH0254283B2
JPH0254283B2 JP58200596A JP20059683A JPH0254283B2 JP H0254283 B2 JPH0254283 B2 JP H0254283B2 JP 58200596 A JP58200596 A JP 58200596A JP 20059683 A JP20059683 A JP 20059683A JP H0254283 B2 JPH0254283 B2 JP H0254283B2
Authority
JP
Japan
Prior art keywords
bcl
adsorption
activated carbon
cocl
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58200596A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6096523A (ja
Inventor
Takahiro Murayama
Tadami Sugimoto
Yoshiro Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Resonac Holdings Corp
Original Assignee
Showa Denko KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Showa Denko KK filed Critical Showa Denko KK
Priority to JP20059683A priority Critical patent/JPS6096523A/ja
Publication of JPS6096523A publication Critical patent/JPS6096523A/ja
Publication of JPH0254283B2 publication Critical patent/JPH0254283B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Treating Waste Gases (AREA)
JP20059683A 1983-10-26 1983-10-26 三塩化ホウ素の精製法 Granted JPS6096523A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20059683A JPS6096523A (ja) 1983-10-26 1983-10-26 三塩化ホウ素の精製法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20059683A JPS6096523A (ja) 1983-10-26 1983-10-26 三塩化ホウ素の精製法

Publications (2)

Publication Number Publication Date
JPS6096523A JPS6096523A (ja) 1985-05-30
JPH0254283B2 true JPH0254283B2 (cs) 1990-11-21

Family

ID=16426981

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20059683A Granted JPS6096523A (ja) 1983-10-26 1983-10-26 三塩化ホウ素の精製法

Country Status (1)

Country Link
JP (1) JPS6096523A (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6238636B1 (en) * 1999-09-03 2001-05-29 Air Liquide America Corporation Process and systems for purification of boron trichloride

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4238465A (en) * 1979-08-01 1980-12-09 Ppg Industries, Inc. Removal of phosgene from boron trichloride
JPS5857368B2 (ja) * 1980-02-13 1983-12-20 宇部興産株式会社 三塩化ホウ素の製造方法

Also Published As

Publication number Publication date
JPS6096523A (ja) 1985-05-30

Similar Documents

Publication Publication Date Title
US6238636B1 (en) Process and systems for purification of boron trichloride
JP6433867B2 (ja) 水素ガス回収システムおよび水素ガスの分離回収方法
TWI670232B (zh) 氟化合物氣體之純化方法
US3020128A (en) Method of preparing materials of high purity
WO2014185499A1 (ja) 塩化水素の精製方法
TWI816959B (zh) 六氟丁二烯之純化方法
CN101189185A (zh) 三氟化氮的纯化
CN106380372B (zh) 一种八氟丙烷的纯化方法及纯化装置
US4713230A (en) Purification of chlorosilanes
WO2017138366A1 (ja) フッ素化合物ガスの精製方法
US3071444A (en) Preparation of purified semiconductor material
JP6698762B2 (ja) 水素ガス回収システムおよび水素ガスの分離回収方法
JP3549226B2 (ja) １，１−ジフルオロエタンの精製法
US4950464A (en) Purification of sulfuryl fluroide by selective adsorption
EP0107784B1 (en) Purification of chlorosilanes
JPH0353017B2 (cs)
JPH04292413A (ja) アンモニアの精製方法
JPH0254283B2 (cs)
JPH10265216A (ja) 三塩化硼素の精製法
JP4458044B2 (ja) 高純度液体塩素の製造方法
JPH072510A (ja) テトラクロロシランの脱リン法
JPS641405B2 (cs)
US6790419B1 (en) Purification of gaseous inorganic halide
JPS61197415A (ja) ジクロロシランの精製法
JPH01132535A (ja) アセチレンガス濃縮方法