JPS641405B2 - - Google Patents

Info

Publication number
JPS641405B2
JPS641405B2 JP16728481A JP16728481A JPS641405B2 JP S641405 B2 JPS641405 B2 JP S641405B2 JP 16728481 A JP16728481 A JP 16728481A JP 16728481 A JP16728481 A JP 16728481A JP S641405 B2 JPS641405 B2 JP S641405B2
Authority
JP
Japan
Prior art keywords
monosilane
impurities
ethane
monochlorosilane
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP16728481A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5869715A (ja
Inventor
Tetsuya Iwao
Osamu Kido
Yoshiaki Toyoda
Reiji Hirai
Yoshinori Ashida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsui Toatsu Chemicals Inc
Original Assignee
Mitsui Toatsu Chemicals Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsui Toatsu Chemicals Inc filed Critical Mitsui Toatsu Chemicals Inc
Priority to JP16728481A priority Critical patent/JPS5869715A/ja
Publication of JPS5869715A publication Critical patent/JPS5869715A/ja
Publication of JPS641405B2 publication Critical patent/JPS641405B2/ja
Granted legal-status Critical Current

Links

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  • Silicon Compounds (AREA)
JP16728481A 1981-10-21 1981-10-21 モノシランの精製方法 Granted JPS5869715A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16728481A JPS5869715A (ja) 1981-10-21 1981-10-21 モノシランの精製方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16728481A JPS5869715A (ja) 1981-10-21 1981-10-21 モノシランの精製方法

Publications (2)

Publication Number Publication Date
JPS5869715A JPS5869715A (ja) 1983-04-26
JPS641405B2 true JPS641405B2 (cs) 1989-01-11

Family

ID=15846895

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16728481A Granted JPS5869715A (ja) 1981-10-21 1981-10-21 モノシランの精製方法

Country Status (1)

Country Link
JP (1) JPS5869715A (cs)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4554141A (en) * 1984-05-14 1985-11-19 Ethyl Corporation Gas stream purification
JPS6163514A (ja) * 1984-09-03 1986-04-01 Mitsui Toatsu Chem Inc モノシランの精製方法
FR2652346B1 (fr) * 1989-09-22 1991-11-29 Air Liquide Procede de preparation de disilane.
JP4843553B2 (ja) * 2007-05-09 2011-12-21 株式会社コロナ 一体型空気調和機
KR101159674B1 (ko) * 2009-11-16 2012-06-25 주식회사 케이씨씨 모노실란의 정제방법

Also Published As

Publication number Publication date
JPS5869715A (ja) 1983-04-26

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