JPH0250761B2 - - Google Patents
Info
- Publication number
- JPH0250761B2 JPH0250761B2 JP24564484A JP24564484A JPH0250761B2 JP H0250761 B2 JPH0250761 B2 JP H0250761B2 JP 24564484 A JP24564484 A JP 24564484A JP 24564484 A JP24564484 A JP 24564484A JP H0250761 B2 JPH0250761 B2 JP H0250761B2
- Authority
- JP
- Japan
- Prior art keywords
- oil
- pump
- cleaning
- vacuum pump
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004140 cleaning Methods 0.000 claims description 22
- 238000000034 method Methods 0.000 claims description 13
- 239000012459 cleaning agent Substances 0.000 claims description 12
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 10
- 239000012535 impurity Substances 0.000 claims description 9
- 239000002253 acid Substances 0.000 claims description 6
- 238000000354 decomposition reaction Methods 0.000 claims description 6
- 239000010419 fine particle Substances 0.000 claims description 6
- 239000005909 Kieselgur Substances 0.000 claims description 5
- 229910021536 Zeolite Inorganic materials 0.000 claims description 5
- 239000011959 amorphous silica alumina Substances 0.000 claims description 5
- HNPSIPDUKPIQMN-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Al]O[Al]=O HNPSIPDUKPIQMN-UHFFFAOYSA-N 0.000 claims description 5
- 239000000741 silica gel Substances 0.000 claims description 5
- 229910002027 silica gel Inorganic materials 0.000 claims description 5
- 239000010457 zeolite Substances 0.000 claims description 5
- -1 moisture Substances 0.000 claims description 4
- 239000003921 oil Substances 0.000 description 44
- 238000001312 dry etching Methods 0.000 description 9
- 230000000052 comparative effect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 150000007513 acids Chemical class 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- AJDIZQLSFPQPEY-UHFFFAOYSA-N 1,1,2-Trichlorotrifluoroethane Chemical compound FC(F)(Cl)C(F)(Cl)Cl AJDIZQLSFPQPEY-UHFFFAOYSA-N 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000010724 circulating oil Substances 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 239000003599 detergent Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000002845 discoloration Methods 0.000 description 1
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 1
- 239000010842 industrial wastewater Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004811 liquid chromatography Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
Landscapes
- Applications Or Details Of Rotary Compressors (AREA)
- Treatment Of Liquids With Adsorbents In General (AREA)
- Compressor (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24564484A JPS61125410A (ja) | 1984-11-20 | 1984-11-20 | 真空ポンプオイルの清浄化方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24564484A JPS61125410A (ja) | 1984-11-20 | 1984-11-20 | 真空ポンプオイルの清浄化方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61125410A JPS61125410A (ja) | 1986-06-13 |
| JPH0250761B2 true JPH0250761B2 (zh) | 1990-11-05 |
Family
ID=17136714
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24564484A Granted JPS61125410A (ja) | 1984-11-20 | 1984-11-20 | 真空ポンプオイルの清浄化方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61125410A (zh) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4842746A (en) * | 1986-06-16 | 1989-06-27 | Quadrex Hps Inc. | Method of removing toxic agents for trichlorotrifluoroethane |
| WO2023100948A1 (ja) * | 2021-11-30 | 2023-06-08 | 大成技研株式会社 | 油水分離システム、添加装置及び油水分離方法 |
| CN114344949B (zh) * | 2021-12-28 | 2023-05-12 | 安徽国孚润滑油工业有限公司 | 一种循环萃余油螺旋冲击式辅助排硅胶的萃余油吸附装置及方法 |
-
1984
- 1984-11-20 JP JP24564484A patent/JPS61125410A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61125410A (ja) | 1986-06-13 |
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