JPH0246907B2 - - Google Patents

Info

Publication number
JPH0246907B2
JPH0246907B2 JP60294863A JP29486385A JPH0246907B2 JP H0246907 B2 JPH0246907 B2 JP H0246907B2 JP 60294863 A JP60294863 A JP 60294863A JP 29486385 A JP29486385 A JP 29486385A JP H0246907 B2 JPH0246907 B2 JP H0246907B2
Authority
JP
Japan
Prior art keywords
layer
piezoelectric ceramic
layers
polarization
laminated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60294863A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62153765A (ja
Inventor
Tokiji Nishida
Susumu Sakurai
Teruo Shimizu
Atsushi Kawai
Katsuhiro Mizoguchi
Takeshi Nishizawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP60294863A priority Critical patent/JPS62153765A/ja
Publication of JPS62153765A publication Critical patent/JPS62153765A/ja
Publication of JPH0246907B2 publication Critical patent/JPH0246907B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Transducers For Ultrasonic Waves (AREA)
  • Pressure Sensors (AREA)
JP60294863A 1985-12-27 1985-12-27 積層型圧電セラミツク素子 Granted JPS62153765A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60294863A JPS62153765A (ja) 1985-12-27 1985-12-27 積層型圧電セラミツク素子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60294863A JPS62153765A (ja) 1985-12-27 1985-12-27 積層型圧電セラミツク素子

Publications (2)

Publication Number Publication Date
JPS62153765A JPS62153765A (ja) 1987-07-08
JPH0246907B2 true JPH0246907B2 (cs) 1990-10-17

Family

ID=17813228

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60294863A Granted JPS62153765A (ja) 1985-12-27 1985-12-27 積層型圧電セラミツク素子

Country Status (1)

Country Link
JP (1) JPS62153765A (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2011001515A1 (ja) * 2009-06-30 2012-12-10 富士通株式会社 加速度センサ、振動発電デバイス及び加速度センサの製造方法

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL2015190A (en) * 2014-09-02 2016-07-12 Asml Netherlands Bv Sensor, object positioning system, lithographic apparatus and device device manufacturing method.
JP6476730B2 (ja) * 2014-10-21 2019-03-06 セイコーエプソン株式会社 力検出装置及びロボット

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53120478A (en) * 1977-03-29 1978-10-20 Kobayashi Rigaku Kenkiyuushiyo Acceleration type oscillation pick up

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2011001515A1 (ja) * 2009-06-30 2012-12-10 富士通株式会社 加速度センサ、振動発電デバイス及び加速度センサの製造方法

Also Published As

Publication number Publication date
JPS62153765A (ja) 1987-07-08

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