JPH0246052Y2 - - Google Patents

Info

Publication number
JPH0246052Y2
JPH0246052Y2 JP1984125052U JP12505284U JPH0246052Y2 JP H0246052 Y2 JPH0246052 Y2 JP H0246052Y2 JP 1984125052 U JP1984125052 U JP 1984125052U JP 12505284 U JP12505284 U JP 12505284U JP H0246052 Y2 JPH0246052 Y2 JP H0246052Y2
Authority
JP
Japan
Prior art keywords
shaft
turntable
main body
cylinder
cover
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984125052U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6139936U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984125052U priority Critical patent/JPS6139936U/ja
Publication of JPS6139936U publication Critical patent/JPS6139936U/ja
Application granted granted Critical
Publication of JPH0246052Y2 publication Critical patent/JPH0246052Y2/ja
Granted legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Landscapes

  • Silicon Compounds (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP1984125052U 1984-08-17 1984-08-17 スピン法用シリコン溶融炉におけるタ−ンテ−ブルの回転昇降装置 Granted JPS6139936U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984125052U JPS6139936U (ja) 1984-08-17 1984-08-17 スピン法用シリコン溶融炉におけるタ−ンテ−ブルの回転昇降装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984125052U JPS6139936U (ja) 1984-08-17 1984-08-17 スピン法用シリコン溶融炉におけるタ−ンテ−ブルの回転昇降装置

Publications (2)

Publication Number Publication Date
JPS6139936U JPS6139936U (ja) 1986-03-13
JPH0246052Y2 true JPH0246052Y2 (enExample) 1990-12-05

Family

ID=30683737

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984125052U Granted JPS6139936U (ja) 1984-08-17 1984-08-17 スピン法用シリコン溶融炉におけるタ−ンテ−ブルの回転昇降装置

Country Status (1)

Country Link
JP (1) JPS6139936U (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0299323U (enExample) * 1989-01-25 1990-08-08
JP4824940B2 (ja) * 2005-04-18 2011-11-30 株式会社第一機電 結晶シリコン製造装置

Also Published As

Publication number Publication date
JPS6139936U (ja) 1986-03-13

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