JPH0246051Y2 - - Google Patents

Info

Publication number
JPH0246051Y2
JPH0246051Y2 JP1984125051U JP12505184U JPH0246051Y2 JP H0246051 Y2 JPH0246051 Y2 JP H0246051Y2 JP 1984125051 U JP1984125051 U JP 1984125051U JP 12505184 U JP12505184 U JP 12505184U JP H0246051 Y2 JPH0246051 Y2 JP H0246051Y2
Authority
JP
Japan
Prior art keywords
shaft
turntable
main body
sealed
elevating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984125051U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6139935U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984125051U priority Critical patent/JPS6139935U/ja
Publication of JPS6139935U publication Critical patent/JPS6139935U/ja
Application granted granted Critical
Publication of JPH0246051Y2 publication Critical patent/JPH0246051Y2/ja
Granted legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Landscapes

  • Silicon Compounds (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP1984125051U 1984-08-17 1984-08-17 スピン法用シリコン溶融炉におけるタ−ンテ−ブルの回転昇降装置 Granted JPS6139935U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984125051U JPS6139935U (ja) 1984-08-17 1984-08-17 スピン法用シリコン溶融炉におけるタ−ンテ−ブルの回転昇降装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984125051U JPS6139935U (ja) 1984-08-17 1984-08-17 スピン法用シリコン溶融炉におけるタ−ンテ−ブルの回転昇降装置

Publications (2)

Publication Number Publication Date
JPS6139935U JPS6139935U (ja) 1986-03-13
JPH0246051Y2 true JPH0246051Y2 (enExample) 1990-12-05

Family

ID=30683736

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984125051U Granted JPS6139935U (ja) 1984-08-17 1984-08-17 スピン法用シリコン溶融炉におけるタ−ンテ−ブルの回転昇降装置

Country Status (1)

Country Link
JP (1) JPS6139935U (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2625310B2 (ja) * 1991-01-08 1997-07-02 シマテク，インコーポレイテッド シリコンウェハーの製造方法および装置

Also Published As

Publication number Publication date
JPS6139935U (ja) 1986-03-13

Similar Documents

Publication Publication Date Title
KR20060103640A (ko) 반도체 제조장치
US5212432A (en) Industrial robot
CN113106549A (zh) 一种采用pvt法制备碳化硅单晶的生长装置
CN115140739B (zh) 一种氧化亚硅的生产设备及方法
US3953281A (en) Method and system for growing monocrystalline ingots
US3960503A (en) Particulate material feeder for high temperature vacuum system
WO1998058087A1 (fr) Alimentateur a goulotte entraine par un cable en acier a l'interieur de la voute du haut-fourneau
CN202401104U (zh) 箱式保护气氛热处理炉
CN102534147B (zh) 箱式保护气氛热处理炉炉门密封装置
TW202328510A (zh) 一種單晶爐及二次加料方法
SU606563A3 (ru) Привод лоткового распределител шихты шахтной печи
JPH0246052Y2 (enExample)
JPH05500238A (ja) 複数の水平に運動可能な炉下側部分を有する閉鎖溶融炉
CN116445706B (zh) 用于合金电阻材料的热处理炉及热处理方法
CN105018715B (zh) 卧式罩式炉
CN213327784U (zh) 一种硬质合金渗碳处理用加热装置
CN221117714U (zh) 一种flux熔剂法材料生长装置
CN207050447U (zh) 一种耐火材料燃烧室加料装置
WO2005087985A1 (de) Seildrehkopf für eine kristallziehanlage
CN222007885U (zh) 一种立式旋转高压气淬真空炉
CN117418306B (zh) 一种气相输运合成生长制备材料的设备
CN219315016U (zh) 一种新型立式退火炉稳定辊装配
CN117398755B (zh) 一种真空状态下的固液分离装置
CN207313668U (zh) 一种用于铜合金的真空感应熔炼炉
CN222912322U (zh) 用于小批量烧结的烧结炉