JPH0244953Y2 - - Google Patents

Info

Publication number
JPH0244953Y2
JPH0244953Y2 JP1985203779U JP20377985U JPH0244953Y2 JP H0244953 Y2 JPH0244953 Y2 JP H0244953Y2 JP 1985203779 U JP1985203779 U JP 1985203779U JP 20377985 U JP20377985 U JP 20377985U JP H0244953 Y2 JPH0244953 Y2 JP H0244953Y2
Authority
JP
Japan
Prior art keywords
nozzle
holder
sensor
workpiece
locking portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1985203779U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62109888U (OSRAM
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985203779U priority Critical patent/JPH0244953Y2/ja
Publication of JPS62109888U publication Critical patent/JPS62109888U/ja
Application granted granted Critical
Publication of JPH0244953Y2 publication Critical patent/JPH0244953Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
JP1985203779U 1985-12-27 1985-12-27 Expired JPH0244953Y2 (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985203779U JPH0244953Y2 (OSRAM) 1985-12-27 1985-12-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985203779U JPH0244953Y2 (OSRAM) 1985-12-27 1985-12-27

Publications (2)

Publication Number Publication Date
JPS62109888U JPS62109888U (OSRAM) 1987-07-13
JPH0244953Y2 true JPH0244953Y2 (OSRAM) 1990-11-28

Family

ID=31169427

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985203779U Expired JPH0244953Y2 (OSRAM) 1985-12-27 1985-12-27

Country Status (1)

Country Link
JP (1) JPH0244953Y2 (OSRAM)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2751766B2 (ja) * 1992-11-30 1998-05-18 三菱電機株式会社 レーザ加工装置
US7886449B2 (en) * 2007-02-20 2011-02-15 Electro Scientific Industries, Inc. Flexure guide bearing for short stroke stage
JP5941087B2 (ja) 2014-03-25 2016-06-29 ファナック株式会社 電源障害時に加工ノズルを退避するレーザ加工装置
WO2020194444A1 (ja) * 2019-03-25 2020-10-01 株式会社ニコン 加工システム

Also Published As

Publication number Publication date
JPS62109888U (OSRAM) 1987-07-13

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