JPH0244140B2 - - Google Patents

Info

Publication number
JPH0244140B2
JPH0244140B2 JP59017591A JP1759184A JPH0244140B2 JP H0244140 B2 JPH0244140 B2 JP H0244140B2 JP 59017591 A JP59017591 A JP 59017591A JP 1759184 A JP1759184 A JP 1759184A JP H0244140 B2 JPH0244140 B2 JP H0244140B2
Authority
JP
Japan
Prior art keywords
photoresist layer
photoresist
positive photoresist
spin
pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59017591A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60161621A (ja
Inventor
Tooru Ookuma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electronics Corp filed Critical Matsushita Electronics Corp
Priority to JP59017591A priority Critical patent/JPS60161621A/ja
Publication of JPS60161621A publication Critical patent/JPS60161621A/ja
Publication of JPH0244140B2 publication Critical patent/JPH0244140B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P95/00—

Landscapes

  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP59017591A 1984-02-01 1984-02-01 半導体装置の製造方法 Granted JPS60161621A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59017591A JPS60161621A (ja) 1984-02-01 1984-02-01 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59017591A JPS60161621A (ja) 1984-02-01 1984-02-01 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS60161621A JPS60161621A (ja) 1985-08-23
JPH0244140B2 true JPH0244140B2 (en:Method) 1990-10-02

Family

ID=11948137

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59017591A Granted JPS60161621A (ja) 1984-02-01 1984-02-01 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS60161621A (en:Method)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH079875B2 (ja) * 1985-09-19 1995-02-01 沖電気工業株式会社 半導体装置の製造方法
JPS6286823A (ja) * 1985-10-14 1987-04-21 Tokyo Ohka Kogyo Co Ltd 微細パタ−ン形成方法
EP0534273B1 (de) * 1991-09-27 1996-05-15 Siemens Aktiengesellschaft Verfahren zur Erzeugung eines Bottom-Resists
DE50015750D1 (de) 1999-04-28 2009-11-12 Qimonda Ag Bottomresist
JP2009179226A (ja) 2008-01-31 2009-08-13 Toyota Motor Corp 燃料タンク構造

Also Published As

Publication number Publication date
JPS60161621A (ja) 1985-08-23

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