JPH0243865Y2 - - Google Patents
Info
- Publication number
- JPH0243865Y2 JPH0243865Y2 JP8645683U JP8645683U JPH0243865Y2 JP H0243865 Y2 JPH0243865 Y2 JP H0243865Y2 JP 8645683 U JP8645683 U JP 8645683U JP 8645683 U JP8645683 U JP 8645683U JP H0243865 Y2 JPH0243865 Y2 JP H0243865Y2
- Authority
- JP
- Japan
- Prior art keywords
- temperature
- evaporation
- inner container
- temperature sensor
- selenium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000008020 evaporation Effects 0.000 claims description 33
- 238000001704 evaporation Methods 0.000 claims description 33
- 239000000463 material Substances 0.000 claims description 19
- 238000010438 heat treatment Methods 0.000 claims description 12
- 108091008695 photoreceptors Proteins 0.000 claims description 9
- 238000001514 detection method Methods 0.000 claims description 8
- 238000007740 vapor deposition Methods 0.000 claims description 4
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 description 10
- 229910001370 Se alloy Inorganic materials 0.000 description 6
- 239000007788 liquid Substances 0.000 description 4
- 229910052711 selenium Inorganic materials 0.000 description 4
- 239000011669 selenium Substances 0.000 description 4
- 229910001215 Te alloy Inorganic materials 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 229910052714 tellurium Inorganic materials 0.000 description 3
- PORWMNRCUJJQNO-UHFFFAOYSA-N tellurium atom Chemical compound [Te] PORWMNRCUJJQNO-UHFFFAOYSA-N 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
Landscapes
- Photoreceptors In Electrophotography (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8645683U JPS59192153U (ja) | 1983-06-07 | 1983-06-07 | 電子写真感光体用蒸着装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8645683U JPS59192153U (ja) | 1983-06-07 | 1983-06-07 | 電子写真感光体用蒸着装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59192153U JPS59192153U (ja) | 1984-12-20 |
| JPH0243865Y2 true JPH0243865Y2 (pm) | 1990-11-21 |
Family
ID=30216386
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8645683U Granted JPS59192153U (ja) | 1983-06-07 | 1983-06-07 | 電子写真感光体用蒸着装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59192153U (pm) |
-
1983
- 1983-06-07 JP JP8645683U patent/JPS59192153U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59192153U (ja) | 1984-12-20 |
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