JPH0243865Y2 - - Google Patents

Info

Publication number

JPH0243865Y2

JPH0243865Y2 JP8645683U JP8645683U JPH0243865Y2 JP H0243865 Y2 JPH0243865 Y2 JP H0243865Y2 JP 8645683 U JP8645683 U JP 8645683U JP 8645683 U JP8645683 U JP 8645683U JP H0243865 Y2 JPH0243865 Y2 JP H0243865Y2

Authority

JP

Japan

Prior art keywords

temperature

evaporation

inner container

temperature sensor

selenium

Prior art date

1983-06-07

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired

Links

• Espacenet
• Global Dossier
• Discuss

• 230000008020 evaporation Effects 0.000 claims description 33
• 238000001704 evaporation Methods 0.000 claims description 33
• 239000000463 material Substances 0.000 claims description 19
• 238000010438 heat treatment Methods 0.000 claims description 12
• 108091008695 photoreceptors Proteins 0.000 claims description 9
• 238000001514 detection method Methods 0.000 claims description 8
• 238000007740 vapor deposition Methods 0.000 claims description 4
• BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 description 10
• 229910001370 Se alloy Inorganic materials 0.000 description 6
• 239000007788 liquid Substances 0.000 description 4
• 229910052711 selenium Inorganic materials 0.000 description 4
• 239000011669 selenium Substances 0.000 description 4
• 229910001215 Te alloy Inorganic materials 0.000 description 3
• 239000000758 substrate Substances 0.000 description 3
• 229910052714 tellurium Inorganic materials 0.000 description 3
• PORWMNRCUJJQNO-UHFFFAOYSA-N tellurium atom Chemical compound [Te] PORWMNRCUJJQNO-UHFFFAOYSA-N 0.000 description 3
• 230000007423 decrease Effects 0.000 description 2
• 238000003466 welding Methods 0.000 description 2
• 229910000838 Al alloy Inorganic materials 0.000 description 1
• 238000000151 deposition Methods 0.000 description 1
• 238000004090 dissolution Methods 0.000 description 1
• 238000009413 insulation Methods 0.000 description 1
• 238000004519 manufacturing process Methods 0.000 description 1
• 238000002844 melting Methods 0.000 description 1
• 230000008018 melting Effects 0.000 description 1
• 229910052751 metal Inorganic materials 0.000 description 1
• 239000002184 metal Substances 0.000 description 1
• 238000001771 vacuum deposition Methods 0.000 description 1
• 238000009834 vaporization Methods 0.000 description 1
• 230000008016 vaporization Effects 0.000 description 1