JPH0243653Y2 - - Google Patents

Description

[Detailed explanation of the invention] [Purpose of the invention] (Field of industrial application) The present invention relates to an eccentric sliding rotary lapping machine that presses and polishes a workpiece between an upper surface plate and a lower surface plate. be.

(Prior Art) A lower surface plate that performs a simple circular motion is used to move the surface plate surface for lapping.

This lower surface plate always has a difference between the outer peripheral speed and the inner peripheral speed, and the amount of polishing of the workpiece that is pressed against the outer peripheral part is large.

Therefore, in order to cope with the wear and tear and eliminate the drawbacks, as shown in Japanese Patent Application Laid-Open No. 55-144958, a means for rotating the carrier for holding the workpiece on the lower surface plate surface is used to reduce the difference in circumferential speed. The idea of eliminating the defects that occur in this way has been put into practice for many years, and the method of correcting the parallelism of the board also follows the same method.

(Problem that the invention aims to solve) The increasing demand for improved mirror polishing precision extends to ultra-hard materials and cylindrical workpieces, but conventional lapping methods cannot achieve sufficient machining precision for these workpieces. I can't.

That is, as seen in the lap disc of the above publication,
Although the surface plate is eccentrically mounted, if you observe the movement of a single point on the surface plate, it is just a simple perfect circular motion, so the surface accuracy of the surface plate may be poor for ultra-hard materials or cylindrical workpieces. It deteriorates in a relatively short period of time, and repairing the surface plate requires the intervention of a particularly skilled technician. Therefore, the current situation is that it is not possible to meet the increasing demands.

For example, when cylindrical lapping is performed using a conventional lapping machine, defects in the lapping machine may
This is manifested by finishing the cylindrical center of the workpiece with a large diameter and both ends with small diameters. Even if cost is ignored, the machining accuracy that can be achieved is still not satisfactory.

In addition, in conventional lapping machines, the upper surface plate that presses and polishes the upper surface of the workpiece is simply rotated concentrically, so the lower surface of the upper surface plate traces the same trajectory, which reduces the accuracy of the upper surface plate. A problem related to retention is that mirror polishing is difficult. In particular, there were many problems in lapping cylindrical workpieces containing ultra-hard materials.

In order to overcome the current situation, this invention is a proposal to solve the problems with the aim of improving productivity related to mirror finishing in microns, and to solve the problem of equipment that maintains a technically high level. This was done in view of the need for a solution, and the lower surface plate is made to slide eccentrically and rotate with the purpose of eliminating the defects caused by known methods and improving productivity and economic efficiency. By introducing a new method and rationalizing its mechanical motion principle, we have created a workpiece held in a carrier that is able to handle particularly complex lap surface trajectories (by continuously shifting the phase of rotational motion that is not a perfect circle). The purpose of the present invention is to provide a lapping machine that improves machining accuracy and shortens completion time by adding a horizontal sliding motion that draws a horizontal trajectory (trajectory), and that also allows correction of the lower surface plate relatively easily. That is.

Furthermore, in addition to the eccentric sliding rotation movement of the lower surface plate, the upper surface plate is rotated eccentrically, so that almost the entire surface of the upper surface plate is brought into even contact with the workpiece. The purpose is also to maintain the accuracy of the upper surface plate and improve the machining accuracy.

[Structure of the idea]

(Means for Solving the Problems) The eccentric sliding rotary lapping machine of the present invention polishes a workpiece 35 held by a carrier 34 while being compressed by rotating lower surface plate 12 and upper surface plate 9. In the lapping machine, the drive mechanism of the lower surface plate 12 is as follows:
The concentric centers of a plurality of planit gears 23 are rotatably supported on a rotary table 27 that is rotationally driven, and the lower surface plate 12 is rotatably supported via shafts 25 provided at eccentric positions of the plurality of planit gears 23. , the plurality of planet gears 23 are meshed with only the sun gear 22 which can be rotationally driven, a difference in the number of teeth is provided between the number of teeth of the sun gear 22 and the number of teeth of the planet gear 23, and furthermore, the number of teeth of the lower surface plate 12 is An upper surface plate 9 is provided which performs eccentric sliding rotation in conjunction with a drive mechanism.

(Function) In the present invention, in addition to the large rotational movement of the rotary table 27, the rotation of the plurality of planit gears 23 causes a small rotational movement on the lower surface plate 12 with a radius equal to the eccentricity of the lower surface plate mounting position of the planetary gear 23. Given. In other words, this lower surface plate 12
performs a rotational movement that is not a perfect circle, which is a combination of a large rotational movement of the rotary table 27 and a small rotational movement of the planit gear 23. Furthermore, this rotational movement that is not a perfect circle is caused by the number of teeth of the sun gear 22 and the planit gear 2.
Due to the difference in the number of teeth between the number of teeth and the number of teeth of 3, a "phase shift" occurs gradually and continuously, and the same trajectory is not drawn. Thereby, there is no risk that only a specific location of the lower surface plate 12 will come into contact with the workpiece, and uneven wear of the lower surface plate is prevented. Furthermore, the upper surface plate 9 has a lower surface plate 12.
The surface plate itself eccentrically slides and rotates in conjunction with the driving force.

(Example) Hereinafter, the present invention will be described in detail with reference to an example shown in the drawings.

As shown in FIGS. 1 and 2, the device main body 1
An elevating column 4 that is moved up and down by a pneumatic or hydraulic cylinder 3 is provided on the side guide 2 of the
A swing arm 5 is provided at the upper end, and the swing arm 5 is horizontally rotated by a motor (not shown).
An electric motor 6 that can be freely adjusted in the range of ~18 rpm is installed, and a rotating shaft 8 is vertically rotatably provided at the tip of the swing arm 5 via a bearing 7. A plate 9 is rotatably mounted, and a rotating shaft 8 of the upper surface plate 9 is rotationally driven by the motor 6 via a V-belt transmission 10.

As shown in FIG.
For example, it is characterized by a structure that allows it to be positioned in relation to the lower surface plate 12 so that it can be eccentrically fixed and worked on multiple floors. The lower surface plate 12 is formed by integrating three discs.

That is, as shown in FIG. 4, two planit gears 23 are meshed with only the sun gear 22 which can be driven to rotate by a rotating shaft 21, and the eccentric flanges 24 on these two planid gears 23 are used to set the gears in an eccentric position. The lower surface plate 12 is rotatably supported by the shaft 25 via a bearing 26. The two planetary gears 23 are connected to a shaft 28 whose concentric centers are erected at 180° on the upper surface of a common rotary table 27.
It is rotatably supported via a bearing 29.
The rotating table 27 is integrally attached to the rotating shaft 30 and drives the lower surface plate 12 to rotate within a range of, for example, 0 to 45 rpm. The vertical load of the lower surface plate 12 is supported by the rotary table 27 via roller bearings 31, as shown in FIG. In addition, in order to eliminate the dimensional machining deviation between the lower surface plate 12 and the bearing on the eccentric flange, the bearings 31 are arranged at 4 to 6 locations,
Omitting the thrust bearings provided on the vertical shafts 25 and 28 contributes to reducing assembly costs.

Further, an internal gear 33 supported by a rotating cylinder 32 that can be rotationally driven is disposed above the outer circumference of the lower surface plate 12, and between the lower surface plate 12 and the upper surface plate 9, four to four carriers are provided. 6 carrier gears 3
4 are interposed radially around the sun gear 22, and the plurality of carrier gears 34 are meshed at equal intervals between the internal gear 33 and the upper part of the sun gear 22. The carrier gear 34 holds a workpiece 3 such as a super hard cylinder on the lower surface plate 12 in a concentric hole.
5 is fitted or fixed and held.

Further, an eccentric disk 37 is integrally attached to the center shaft 36, and a rotary ring 39 is rotatably provided on the eccentric disk 37 via a bearing 38.
For example, there are four vertical grooves 40 in this rotating ring 39.
an engagement piece 4 rotatably supported on the upper surface plate 9;
1. A flange member 42 is integrally screwed onto the upper surface plate 9, and an engagement ring 47 of a support member 46 is integrally provided on the rotating shaft 8 of the upper part of the rotation via support members 43, 44, 45. It loosely fits into the shaft portion 48 of the flange member 42.

In this way, the device can be driven in 2-way or 4-way.

In the two-way drive, the sun gear 22 and internal gear 33 are rotationally driven, but the upper surface plate 9 and the rotary table 27 are not rotationally driven. That is, the two planetary gears 23 rotate around the shaft 28 in fixed positions,
The eccentric position of the shaft 2 of these two planit gears 23
The lower surface plate 12, which is supported by the shaft 5, performs a circular motion with a radius equal to the distance between the shafts 25 and 28, without rotating.
The carrier gear 34 rotates and revolves while holding the workpiece 35 in accordance with the relative rotational speeds of the sun gear 22 and the internal gear 33. The workpiece 35 is polished between the upper surface plate 9 and the lower surface plate 12. In this two-ray drive in which the upper and lower surface plates 9 and 12 do not rotate, it is easy to achieve machining accuracy, but it takes time if there is a large amount of lap.

In the four-way drive, the rotating table 27 and rotating shaft 8 are rotated in opposite directions together with the sun gear 22 and the internal gear 33, and the lower surface plate 12 and the upper surface plate 9 are rotated.

The motion trajectory of the lower surface plate 12 at this time is found as follows:
In addition to the large rotational movement of the rotary table 27, the rotation of the two planetary gears 23 causes a small rotational movement with a radius equal to the eccentricity of the surface plate mounting position of the planetary gear 23 (distance between the shafts 25 and 28) to the lower surface plate. 12, so this lower surface plate 12
performs a rotational movement that is not a perfect circle, which is a combination of a large rotational movement of the rotary table 27 and a small rotational movement of the planit gear 23. Furthermore, this rotational movement that is not a perfect circle is caused by the number of teeth of the sun gear 22 and the planit gear 2.
A "phase shift" occurs gradually and continuously according to the difference between the number of teeth and the number of teeth, and the same trajectory is not drawn.

The initial motion trajectory of the lower surface plate 12 is shown in FIGS. 6 and 7. The number of teeth of the sun gear 22 at this time is 46. The number of teeth of the planet gear 23 is 44. Figure 6 shows the absolute motion locus of the lower surface plate 12 measured at one point fixed on the device main body 1, and it is a perfect circle, with the rotational motion (elliptic motion) gradually and continuously being "out of phase." The condition is clear. FIG. 7 shows the locus of movement of the lower surface plate 12 measured in the carrier gear 34, and this movement acts on the workpiece 35.

Further, the upper surface plate 9 rotates in the opposite direction to the lower surface plate 12 while being eccentric due to the eccentric disk 37 . At this time, the shaft portion 48 of the flange member 42 slides inside the engagement ring 47. When the upper and lower surface plates 9 and 12 rotate in this way, the lap time becomes shorter than when the two-way drive is performed.

Furthermore, by rotating the center shaft 36 and rotating the eccentric disk 37, the upper surface plate 9 performs a circular motion with the radius of the eccentricity of the disk 37.
By combining this drive with the two-way drive, the lower surface plate 12 can be moved in a small circle without rotating, and it is also possible to combine it with the four-way drive.

Although the carrier 34 in the above embodiment is a gear, the carrier is not limited to this gear. For example, a disc-shaped carrier may be attached to the internal gear 33 or another ring member corresponding to this gear 33. It may be mounted concentrically or eccentrically, and the workpiece may be held within the carrier to perform various carrier movements, such as rotation or non-rotation, or oscillation or non-oscillation.

[Effect of idea]

According to the present invention, a plurality of planet gears are pivotally supported by a rotary table, a lower surface plate is pivotally supported via a shaft provided at an eccentric position of the plurality of planet gears,
Since the plurality of planet gears are meshed only with the sun gear and a difference in the number of teeth is provided between the number of teeth of this sun gear and the number of teeth of the above-mentioned planet gear, in addition to the large rotational movement of the rotary table, the rotation of the plurality of planet gears causes A small rotational movement with a radius equal to the eccentricity of the mounting position of the lower surface plate on the planet gear is given to the lower surface plate, and as a result, the lower surface plate becomes a non-perfect circle due to the combination of the large rotational movement of the rotary table and the small rotational movement of the planet gear. In addition to rotating motion, this rotational motion that is not a perfect circle gradually and continuously causes a "phase shift" due to the difference in the number of teeth between the sun gear and the planar gear, causing the same trajectory to occur. Since it is not drawn, there is no risk that only a specific part of the lower surface plate will come into contact with the workpiece, and uneven wear of the lower surface plate is prevented. Therefore, it is possible to maintain a high-precision finish during lapping over a long period of time, improve lapping efficiency, and improve productivity.Also, the parallel surface accuracy of the lower surface plate can be maintained at a high level of accuracy, and the When correcting a plate, a correction plate of equal thickness is fixed between a lower surface plate and an upper surface plate that rotate eccentrically and rotate, and after continuing rotation, the correction plate is turned upside down. By repeating the process several times, the parallel surface of the surface plate can be corrected, and the accuracy suitable for mirror polishing can be restored relatively easily.

In this way, the present invention provides eccentric sliding rotational motion that is not a perfect circle to the lower surface plate, which is pivotally supported at eccentric positions of a plurality of planar gears arranged on a rotary table, and the phase of the motion gradually shifts. As a result, various lapping means can be provided as a precision mirror polishing machine which is extremely stable and highly productive, and which is especially suitable for cylindrical products mainly made of ultra-hard materials.

Furthermore, according to the present invention, since the upper surface plate rotates eccentrically in conjunction with the drive mechanism of the lower surface plate, the workpiece held by the carrier can be moved between the low-speed inner peripheral edge of the upper surface plate that rotates eccentrically and the high-speed inner edge of the upper surface plate. Since almost the entire surface of the upper surface plate is in uniform contact with the workpiece due to relative fluctuations between the outer circumference and the outer periphery, it is easy to maintain the precision of the upper surface plate as well as the machining accuracy, and it is possible to improve the lapping efficiency.

[Brief explanation of drawings]

Fig. 1 is a front view showing an embodiment of the eccentric sliding rotary lap board of the present invention, Fig. 2 is a side view thereof, and Fig. 3
4 is a sectional view of the main part thereof, FIG. 5 is a sectional view of a part thereof, FIGS. 6 and 7 show the locus of motion of the lower surface plate according to the present invention, and The figure shows the absolute motion trajectory measured at a fixed point, and FIG. 7 shows the motion trajectory measured at the carrier gear. 9... Upper surface plate, 12... Lower surface plate, 22... Sun gear, 23... Planit gear, 25... Shaft, 2
7...Rotary table, 34...Gear as a carrier,
35...Work.

Claims (1)

[Scope of utility model registration request] In a lapping machine that polishes a workpiece held by a carrier while being compressed by a rotating lower surface plate and an upper surface plate, the drive mechanism of the lower surface plate rotates the concentric centers of a plurality of planar gears on a rotary table that is driven to rotate. The lower surface plate is rotatably supported via a shaft provided at an eccentric position of the plurality of planet gears, and the plurality of planet gears are meshed only with a sun gear that can be rotationally driven. An eccentric sliding device characterized in that an upper surface plate is provided, which has a difference in the number of teeth between the number of teeth and the number of teeth of the planar gear, and performs eccentric sliding rotation in conjunction with the drive mechanism of the lower surface plate. Rotating lap board.