JPH0241885Y2 - - Google Patents
Info
- Publication number
- JPH0241885Y2 JPH0241885Y2 JP17715987U JP17715987U JPH0241885Y2 JP H0241885 Y2 JPH0241885 Y2 JP H0241885Y2 JP 17715987 U JP17715987 U JP 17715987U JP 17715987 U JP17715987 U JP 17715987U JP H0241885 Y2 JPH0241885 Y2 JP H0241885Y2
- Authority
- JP
- Japan
- Prior art keywords
- lid
- opening
- outer cover
- tank
- rack
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000018044 dehydration Effects 0.000 claims description 13
- 238000006297 dehydration reaction Methods 0.000 claims description 13
- 238000005406 washing Methods 0.000 claims description 5
- 210000000078 claw Anatomy 0.000 claims description 4
- 238000004140 cleaning Methods 0.000 description 16
- 239000000463 material Substances 0.000 description 9
- 230000000694 effects Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Casings For Electric Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17715987U JPH0241885Y2 (enrdf_load_stackoverflow) | 1987-11-20 | 1987-11-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17715987U JPH0241885Y2 (enrdf_load_stackoverflow) | 1987-11-20 | 1987-11-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0180987U JPH0180987U (enrdf_load_stackoverflow) | 1989-05-30 |
| JPH0241885Y2 true JPH0241885Y2 (enrdf_load_stackoverflow) | 1990-11-08 |
Family
ID=31468835
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17715987U Expired JPH0241885Y2 (enrdf_load_stackoverflow) | 1987-11-20 | 1987-11-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0241885Y2 (enrdf_load_stackoverflow) |
-
1987
- 1987-11-20 JP JP17715987U patent/JPH0241885Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0180987U (enrdf_load_stackoverflow) | 1989-05-30 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4924890A (en) | Method and apparatus for cleaning semiconductor wafers | |
| JPH07309440A (ja) | 搬送システム | |
| US20030106571A1 (en) | Substrate processing apparatus and substrate processing method | |
| IL302754A (en) | Device and method for handling pot-shaped hollow bodies, more particularly transport containers for semiconductor wafers or for euv lithography masks | |
| JPH0241885Y2 (enrdf_load_stackoverflow) | ||
| JP3953293B2 (ja) | ウエハキャリア自動洗浄設備 | |
| KR102529670B1 (ko) | 샘플용기 자동 비움 및 세정 건조 장치 | |
| JPH1116876A (ja) | 乾燥処理装置 | |
| JP2909432B2 (ja) | スピン洗浄処理ユニット | |
| US6866460B2 (en) | Apparatus and method for loading of carriers containing semiconductor wafers and other media | |
| KR102529674B1 (ko) | 샘플용기 자동 비움 및 세정 건조 장치 | |
| CA1210163A (en) | Self-closing shielded container for use with radioactive materials | |
| JPH07211685A (ja) | スピンナー洗浄装置 | |
| JPH0245200Y2 (enrdf_load_stackoverflow) | ||
| JPS63111637A (ja) | ウエハ搬送処理装置 | |
| KR100460729B1 (ko) | 반전장치 및 연마장치 | |
| JPH0128673Y2 (enrdf_load_stackoverflow) | ||
| JPH07307380A (ja) | キャリアボックス | |
| JPH0155573B2 (enrdf_load_stackoverflow) | ||
| JPH04329636A (ja) | ウエット処理装置及びウエット処理方法 | |
| JPS637822B2 (enrdf_load_stackoverflow) | ||
| KR100486094B1 (ko) | 스핀 린스 드라이장치 | |
| JPS6227790U (enrdf_load_stackoverflow) | ||
| JP2530285Y2 (ja) | ウエハーの水切乾燥装置 | |
| SU432081A1 (ru) | Захват-квантователь |