JPH0241885Y2 - - Google Patents

Description

[Detailed description of the invention] [Industrial application field] The present invention relates to a lid opening/closing device, and in particular to a lid opening/closing device in which a lid hinged to the tank body of a cleaning/dehydration tank can be opened on both sides of the tank body. Regarding equipment.

[Conventional technology]

Generally, in order to perform etching processing on objects to be processed such as semiconductor wafers, the semiconductor wafer is placed in a carrier and immersed in a chemical bath, then spray-cleaned with pure water, and then dehydrated and dried by high-speed centrifugal rotation. . This type of cleaning/dehydration tank has a rotating body that can rotate at high speed inside the tank body, and a single-opening lid that can rotate around a hinge axis is attached to the opening of the tank body. Further, the cleaning/dehydration tank is usually arranged next to the chemical treatment tank, and the loading and unloading of the objects to be treated into and out of the tank body is automatically performed using a material handling robot. This material handling robot is installed on one side of the cleaning and dehydrating tank, and its arms extend into the main body of the cleaning and dehydrating tank to automatically perform the necessary work. and,
Workers usually stand on the opposite side of the material handling robot and perform the necessary work.

[Problem that the invention attempts to solve]

By the way, the lid of this type of cleaning/dehydration tank is hinged so that it opens on the side where the operating arm of the material handling robot moves, so when the lid is open,
When cleaning the cleaning and dehydrating chamber in the rotary cylinder from time to time, there was a problem in that the single-open lid stood in front of the operator, blocking his or her view and making the work difficult.

SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide a lid opening/closing device that can open and close a lid hinged to both sides of a tank body of a cleaning/dehydration tank.

[Means for solving the problem] In order to achieve the above object, the present invention hinges one side of the inner lid, which has an outlet opening approximately in the center, to the tank body of the cleaning and dehydration tank. At the same time, one side of the outer cover is hinged to one side opposite to the one side of the outer cover, and an opening/closing cylinder device is provided between the inner cover and the tank body to open and close the inner cover around the hinge axis, Furthermore, the present invention is characterized in that a fixing stay means for holding the outer cover in an open state is provided between the inner cover and the outer cover.

[Effect]

According to the present invention, when an operator cleans the inside of the cleaning/dehydration tank, the operator lifts only the outer cover, and when the outer cover opens by a predetermined angle, the fixed stay means holds the outer cover in an open state, and Reach out and perform any necessary cleaning work. On the other hand, when it is necessary to carry in and out the material to be processed by the material handling robot, the outer cover and the inner cover are kept overlapped and the cover is opened and closed to the opposite side to open the material handling robot side.

〔Example〕

An example in which the lid opening/closing device according to the present invention is applied to a washing and dehydrating tank will be described below, but the present invention is not limited thereto.

In the figure, reference numeral 1 indicates the tank main body of the cleaning and dehydration tank. This tank main body 1 is a rectangular parallelepiped-shaped box with an open upper end, and inside it, necessary processing equipment such as a rotary cylinder 2 that can rotate at high speed is installed. It is accommodated. A lid opening/closing device 3 according to the present invention is installed on the tank body 1. The lid opening/closing device 3 consists of a rectangular inner lid 4 and an outer lid 5 of the same shape and size.
is pivotally connected at one side by a hinge 6. Furthermore, a circular outlet 7 is formed in the center of the inner lid 4 for carrying in and out the object to be treated into the tank body. This inner lid 4 is driven to open and close by an opening/closing cylinder device 8, and this opening/closing cylinder device is preferably constituted by a single-shaft operated pneumatic cylinder.

Further, on the opposite side of the inner lid 4 from the hinge 6,
One side of the outer cover 5 is pivotally connected by a hinge 9. The outer cover 5 can be overlapped with the inner cover 4 so as to be in close contact with each other, and a seal ring 10 is preferably disposed around the outer periphery of the outlet 7 of the inner cover 4 in order to enhance the close contact effect.

In addition, a fixed stay means 11 is provided to open the outer cover 5 and hold it in that state. This fixing stay means 11 is for fixing and holding the outer cover 5 in an appropriately opened state, and in this embodiment, a hook mechanism is adopted.

That is, as shown in FIG.
The rack housing cylinder 12 has one end pivotally attached to the side surface of the inner cover 4 by a pin 14, while the tip of the rack rod 13 is pivotally attached to the side surface of the outer cover 5 by a pin 15. It is worn. Rack rod 13
has rack teeth 16 as shown, and a claw 17 that can engage with the rack teeth 16 is attached to the rack housing cylinder 12.
It is pivotally connected to the side of the body by a pin 18. Therefore, when pulling out the rack rod 13 in the direction of arrow A, it is possible to pull it out over the claw 17, but
Conversely, when the rack rod 13 is pushed in the direction of arrow B, the pawl 17 meshes with one of the rack teeth 16 to stop the rack rod 13.

The cleaning and dehydration tank configured as described above is
In Fig. 2, the left side of the figure is the front side where the worker stands and works, and is provided with the necessary operation panel 18, while the material handling robot 19 is installed on the opposite side. The robot arm 21 is designed to be able to traverse along the rail 20 and move back and forth.

Since the present invention is configured in this way, when the material handling robot 19 is used to carry in and out the workpiece into the tank body, the opening/closing cylinder device 8 is driven to open the inner lid 4 and the outer lid 5. Open and close them while stacking them. On the other hand, when an operator cleans the inside of the washing/dehydration tank, the operator lifts only the outer cover 5 around the hinge 9 to a predetermined angle while keeping the inner cover 4 closed, and when the worker releases his/her hand, the rack rod 13 A pawl 17 engages with one of the lock teeth 16 to hold the outer lid 5 in that position. When the cleaning work is completed, the outer cover 5 may be closed while pushing in the rack bar 13 with the claw 17 returned to its original position.

[Effect of idea]

As is clear from the above explanation, one side of the inner lid is hinged to the tank body, and the outer lid is hinged to one side on the opposite side.
The lid can be opened and closed on either the front side or the back side of the main body of a tank such as a cleaning/dehydration tank, making it easy to use.

[Brief explanation of drawings]

FIG. 1 is a perspective view showing a lid opening/closing device according to the present invention, FIG. 2 is a side view showing a washing and dehydrating tank to which the present invention is applied, and FIG. 3 is a sectional view showing a fixing stay means. 1...Washing dehydration tank, 3...Lid opening/closing device, 4...
...Inner lid, 5...Outer cover, 6...Hinge, 7...Outlet, 8...Opening/closing cylinder device, 9...Hinge, 1
1...Fixing stay means.

Claims (1)

[Scope of Claim for Utility Model Registration] 1. One side of the inner lid with an outlet opening approximately in the center is hinged to the main body of the washing/dehydration tank, and one side of the inner lid opposite to the one side One side of the outer cover is hinged to the side, an opening/closing cylinder device for opening and closing the inner cover around the hinge axis is provided between the inner cover and the tank body, and an outer cover is further placed between the inner cover and the outer cover. A lid opening/closing device characterized by being provided with a fixed stay means for holding the lid in an open state. 2. The lid opening/closing device according to claim 1, wherein the inner lid and the outer lid are made of rectangular plates. 3. A utility model characterized in that the fixed stay means includes a rack housing cylinder, a rack rod inserted into the rack housing cylinder and provided with rack teeth, and a claw capable of meshing with the rack teeth. A lid opening/closing device according to registered claim 1.