JPH0241167Y2 - - Google Patents

Info

Publication number
JPH0241167Y2
JPH0241167Y2 JP77586U JP77586U JPH0241167Y2 JP H0241167 Y2 JPH0241167 Y2 JP H0241167Y2 JP 77586 U JP77586 U JP 77586U JP 77586 U JP77586 U JP 77586U JP H0241167 Y2 JPH0241167 Y2 JP H0241167Y2
Authority
JP
Japan
Prior art keywords
hearth
evaporation
vapor deposition
opening
deck
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP77586U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62114055U (enEXAMPLES
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP77586U priority Critical patent/JPH0241167Y2/ja
Publication of JPS62114055U publication Critical patent/JPS62114055U/ja
Application granted granted Critical
Publication of JPH0241167Y2 publication Critical patent/JPH0241167Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP77586U 1986-01-08 1986-01-08 Expired JPH0241167Y2 (enEXAMPLES)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP77586U JPH0241167Y2 (enEXAMPLES) 1986-01-08 1986-01-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP77586U JPH0241167Y2 (enEXAMPLES) 1986-01-08 1986-01-08

Publications (2)

Publication Number Publication Date
JPS62114055U JPS62114055U (enEXAMPLES) 1987-07-20
JPH0241167Y2 true JPH0241167Y2 (enEXAMPLES) 1990-11-01

Family

ID=30778060

Family Applications (1)

Application Number Title Priority Date Filing Date
JP77586U Expired JPH0241167Y2 (enEXAMPLES) 1986-01-08 1986-01-08

Country Status (1)

Country Link
JP (1) JPH0241167Y2 (enEXAMPLES)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4701486B2 (ja) * 2000-09-18 2011-06-15 エプソントヨコム株式会社 電子ビーム蒸着用電子銃、蒸着材料保持装置、及び蒸着装置

Also Published As

Publication number Publication date
JPS62114055U (enEXAMPLES) 1987-07-20

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