JPH0240611Y2 - - Google Patents
Info
- Publication number
- JPH0240611Y2 JPH0240611Y2 JP3984284U JP3984284U JPH0240611Y2 JP H0240611 Y2 JPH0240611 Y2 JP H0240611Y2 JP 3984284 U JP3984284 U JP 3984284U JP 3984284 U JP3984284 U JP 3984284U JP H0240611 Y2 JPH0240611 Y2 JP H0240611Y2
- Authority
- JP
- Japan
- Prior art keywords
- elastic member
- vacuum suction
- annular groove
- suction table
- master
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000463 material Substances 0.000 claims description 13
- 229920001296 polysiloxane Polymers 0.000 claims description 13
- 230000000694 effects Effects 0.000 description 7
- 238000007689 inspection Methods 0.000 description 7
- 239000002210 silicon-based material Substances 0.000 description 5
- 238000000034 method Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000004891 communication Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
Landscapes
- Holding Or Fastening Of Disk On Rotational Shaft (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3984284U JPS60155042U (ja) | 1984-03-20 | 1984-03-20 | 真空吸着テ−ブル |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3984284U JPS60155042U (ja) | 1984-03-20 | 1984-03-20 | 真空吸着テ−ブル |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60155042U JPS60155042U (ja) | 1985-10-16 |
| JPH0240611Y2 true JPH0240611Y2 (enrdf_load_stackoverflow) | 1990-10-30 |
Family
ID=30548167
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3984284U Granted JPS60155042U (ja) | 1984-03-20 | 1984-03-20 | 真空吸着テ−ブル |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60155042U (enrdf_load_stackoverflow) |
-
1984
- 1984-03-20 JP JP3984284U patent/JPS60155042U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60155042U (ja) | 1985-10-16 |
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