JPH0240310Y2 - - Google Patents
Info
- Publication number
- JPH0240310Y2 JPH0240310Y2 JP15756784U JP15756784U JPH0240310Y2 JP H0240310 Y2 JPH0240310 Y2 JP H0240310Y2 JP 15756784 U JP15756784 U JP 15756784U JP 15756784 U JP15756784 U JP 15756784U JP H0240310 Y2 JPH0240310 Y2 JP H0240310Y2
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- line
- vacuum chamber
- valve
- evacuation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007789 gas Substances 0.000 description 7
- 239000011261 inert gas Substances 0.000 description 6
- 238000013022 venting Methods 0.000 description 6
- 239000000428 dust Substances 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000001883 metal evaporation Methods 0.000 description 2
- 238000001947 vapour-phase growth Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15756784U JPH0240310Y2 (en, 2012) | 1984-10-18 | 1984-10-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15756784U JPH0240310Y2 (en, 2012) | 1984-10-18 | 1984-10-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6173086U JPS6173086U (en, 2012) | 1986-05-17 |
| JPH0240310Y2 true JPH0240310Y2 (en, 2012) | 1990-10-26 |
Family
ID=30715556
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15756784U Expired JPH0240310Y2 (en, 2012) | 1984-10-18 | 1984-10-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0240310Y2 (en, 2012) |
-
1984
- 1984-10-18 JP JP15756784U patent/JPH0240310Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6173086U (en, 2012) | 1986-05-17 |
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