JPH0240033Y2 - - Google Patents
Info
- Publication number
- JPH0240033Y2 JPH0240033Y2 JP18147885U JP18147885U JPH0240033Y2 JP H0240033 Y2 JPH0240033 Y2 JP H0240033Y2 JP 18147885 U JP18147885 U JP 18147885U JP 18147885 U JP18147885 U JP 18147885U JP H0240033 Y2 JPH0240033 Y2 JP H0240033Y2
- Authority
- JP
- Japan
- Prior art keywords
- lever
- article
- carrier
- positioning
- spring force
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 235000012431 wafers Nutrition 0.000 description 10
- 238000004140 cleaning Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000000428 dust Substances 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Special Conveying (AREA)
- Control Of Conveyors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18147885U JPH0240033Y2 (US07368563-20080506-C00056.png) | 1985-11-27 | 1985-11-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18147885U JPH0240033Y2 (US07368563-20080506-C00056.png) | 1985-11-27 | 1985-11-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6289212U JPS6289212U (US07368563-20080506-C00056.png) | 1987-06-08 |
| JPH0240033Y2 true JPH0240033Y2 (US07368563-20080506-C00056.png) | 1990-10-25 |
Family
ID=31126383
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18147885U Expired JPH0240033Y2 (US07368563-20080506-C00056.png) | 1985-11-27 | 1985-11-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0240033Y2 (US07368563-20080506-C00056.png) |
-
1985
- 1985-11-27 JP JP18147885U patent/JPH0240033Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6289212U (US07368563-20080506-C00056.png) | 1987-06-08 |
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