JPH0238930Y2 - - Google Patents
Info
- Publication number
- JPH0238930Y2 JPH0238930Y2 JP16709483U JP16709483U JPH0238930Y2 JP H0238930 Y2 JPH0238930 Y2 JP H0238930Y2 JP 16709483 U JP16709483 U JP 16709483U JP 16709483 U JP16709483 U JP 16709483U JP H0238930 Y2 JPH0238930 Y2 JP H0238930Y2
- Authority
- JP
- Japan
- Prior art keywords
- pipe
- gun
- water
- water supply
- supply pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 47
- 238000004544 sputter deposition Methods 0.000 claims description 22
- 239000000498 cooling water Substances 0.000 claims description 16
- 238000001816 cooling Methods 0.000 claims description 7
- 238000010586 diagram Methods 0.000 description 2
- 238000007599 discharging Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16709483U JPS6075459U (ja) | 1983-10-28 | 1983-10-28 | スパツタガンの水抜き装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16709483U JPS6075459U (ja) | 1983-10-28 | 1983-10-28 | スパツタガンの水抜き装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6075459U JPS6075459U (ja) | 1985-05-27 |
| JPH0238930Y2 true JPH0238930Y2 (en, 2012) | 1990-10-19 |
Family
ID=30365655
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16709483U Granted JPS6075459U (ja) | 1983-10-28 | 1983-10-28 | スパツタガンの水抜き装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6075459U (en, 2012) |
-
1983
- 1983-10-28 JP JP16709483U patent/JPS6075459U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6075459U (ja) | 1985-05-27 |
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