JPH0238927Y2 - - Google Patents
Info
- Publication number
- JPH0238927Y2 JPH0238927Y2 JP1982187349U JP18734982U JPH0238927Y2 JP H0238927 Y2 JPH0238927 Y2 JP H0238927Y2 JP 1982187349 U JP1982187349 U JP 1982187349U JP 18734982 U JP18734982 U JP 18734982U JP H0238927 Y2 JPH0238927 Y2 JP H0238927Y2
- Authority
- JP
- Japan
- Prior art keywords
- rail
- workpiece
- standby
- main rail
- cylindrical chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/40—Solar thermal energy, e.g. solar towers
Landscapes
- Surface Treatment Of Glass (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18734982U JPS5991360U (ja) | 1982-12-12 | 1982-12-12 | 反応性蒸着膜形成装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18734982U JPS5991360U (ja) | 1982-12-12 | 1982-12-12 | 反応性蒸着膜形成装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5991360U JPS5991360U (ja) | 1984-06-21 |
| JPH0238927Y2 true JPH0238927Y2 (cs) | 1990-10-19 |
Family
ID=30404428
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18734982U Granted JPS5991360U (ja) | 1982-12-12 | 1982-12-12 | 反応性蒸着膜形成装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5991360U (cs) |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| AU507748B2 (en) * | 1976-06-10 | 1980-02-28 | University Of Sydney, The | Reactive sputtering |
| JPS5917192B2 (ja) * | 1980-08-05 | 1984-04-19 | 日本真空技術株式会社 | 真空処理装置 |
| JPS5912867U (ja) * | 1982-07-19 | 1984-01-26 | 富士電機株式会社 | 電子写真用感光体製造装置 |
-
1982
- 1982-12-12 JP JP18734982U patent/JPS5991360U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5991360U (ja) | 1984-06-21 |
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