JPH0238740U - - Google Patents

Info

Publication number
JPH0238740U
JPH0238740U JP11687988U JP11687988U JPH0238740U JP H0238740 U JPH0238740 U JP H0238740U JP 11687988 U JP11687988 U JP 11687988U JP 11687988 U JP11687988 U JP 11687988U JP H0238740 U JPH0238740 U JP H0238740U
Authority
JP
Japan
Prior art keywords
substrate
holding
holding means
pair
pinion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11687988U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0713220Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988116879U priority Critical patent/JPH0713220Y2/ja
Publication of JPH0238740U publication Critical patent/JPH0238740U/ja
Application granted granted Critical
Publication of JPH0713220Y2 publication Critical patent/JPH0713220Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1988116879U 1988-09-07 1988-09-07 基板搬送装置における基板保持装置 Expired - Lifetime JPH0713220Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988116879U JPH0713220Y2 (ja) 1988-09-07 1988-09-07 基板搬送装置における基板保持装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988116879U JPH0713220Y2 (ja) 1988-09-07 1988-09-07 基板搬送装置における基板保持装置

Publications (2)

Publication Number Publication Date
JPH0238740U true JPH0238740U (US20080094685A1-20080424-C00004.png) 1990-03-15
JPH0713220Y2 JPH0713220Y2 (ja) 1995-03-29

Family

ID=31359820

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988116879U Expired - Lifetime JPH0713220Y2 (ja) 1988-09-07 1988-09-07 基板搬送装置における基板保持装置

Country Status (1)

Country Link
JP (1) JPH0713220Y2 (US20080094685A1-20080424-C00004.png)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06278806A (ja) * 1993-03-29 1994-10-04 Dainippon Screen Mfg Co Ltd 基板支持アーム
JPH09165104A (ja) * 1995-12-19 1997-06-24 Advantest Corp ハンドラ装置のストッカ部
JP2017094413A (ja) * 2015-11-19 2017-06-01 株式会社椿本チエイン ワークピッキング装置
JP2018192576A (ja) * 2017-05-18 2018-12-06 Smc株式会社 ワーク把持装置
JP2019130638A (ja) * 2018-02-01 2019-08-08 中洲電機株式会社 ハンドリング装置及び搬送装置
CN111618845A (zh) * 2019-02-28 2020-09-04 精工爱普生株式会社 机器人系统

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5072697B2 (ja) * 2008-04-23 2012-11-14 セマテックノース インコーポレテッド 薄板の保持装置及び該装置を有するフォトマスクの保持システム並びに搬送方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6079742U (ja) * 1983-11-09 1985-06-03 日立電子エンジニアリング株式会社 角マスクチヤツク機構
JPS61138444U (US20080094685A1-20080424-C00004.png) * 1985-02-12 1986-08-28
JPS6232789U (US20080094685A1-20080424-C00004.png) * 1985-08-13 1987-02-26
JPS62103519U (US20080094685A1-20080424-C00004.png) * 1985-12-20 1987-07-01

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6079742U (ja) * 1983-11-09 1985-06-03 日立電子エンジニアリング株式会社 角マスクチヤツク機構
JPS61138444U (US20080094685A1-20080424-C00004.png) * 1985-02-12 1986-08-28
JPS6232789U (US20080094685A1-20080424-C00004.png) * 1985-08-13 1987-02-26
JPS62103519U (US20080094685A1-20080424-C00004.png) * 1985-12-20 1987-07-01

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06278806A (ja) * 1993-03-29 1994-10-04 Dainippon Screen Mfg Co Ltd 基板支持アーム
JPH09165104A (ja) * 1995-12-19 1997-06-24 Advantest Corp ハンドラ装置のストッカ部
JP2017094413A (ja) * 2015-11-19 2017-06-01 株式会社椿本チエイン ワークピッキング装置
JP2018192576A (ja) * 2017-05-18 2018-12-06 Smc株式会社 ワーク把持装置
CN108943000A (zh) * 2017-05-18 2018-12-07 Smc株式会社 工件夹持装置
TWI758477B (zh) * 2017-05-18 2022-03-21 日商Ｓｍｃ股份有限公司 工件夾持裝置
CN108943000B (zh) * 2017-05-18 2022-10-14 Smc株式会社 工件夹持装置
JP2019130638A (ja) * 2018-02-01 2019-08-08 中洲電機株式会社 ハンドリング装置及び搬送装置
CN111618845A (zh) * 2019-02-28 2020-09-04 精工爱普生株式会社 机器人系统

Also Published As

Publication number Publication date
JPH0713220Y2 (ja) 1995-03-29

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