JPH0238442Y2 - - Google Patents

Info

Publication number
JPH0238442Y2
JPH0238442Y2 JP1984142402U JP14240284U JPH0238442Y2 JP H0238442 Y2 JPH0238442 Y2 JP H0238442Y2 JP 1984142402 U JP1984142402 U JP 1984142402U JP 14240284 U JP14240284 U JP 14240284U JP H0238442 Y2 JPH0238442 Y2 JP H0238442Y2
Authority
JP
Japan
Prior art keywords
substrate
groove
substrate holder
metal wire
holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984142402U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6157515U (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984142402U priority Critical patent/JPH0238442Y2/ja
Publication of JPS6157515U publication Critical patent/JPS6157515U/ja
Application granted granted Critical
Publication of JPH0238442Y2 publication Critical patent/JPH0238442Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP1984142402U 1984-09-20 1984-09-20 Expired JPH0238442Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984142402U JPH0238442Y2 (enExample) 1984-09-20 1984-09-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984142402U JPH0238442Y2 (enExample) 1984-09-20 1984-09-20

Publications (2)

Publication Number Publication Date
JPS6157515U JPS6157515U (enExample) 1986-04-17
JPH0238442Y2 true JPH0238442Y2 (enExample) 1990-10-17

Family

ID=30700724

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984142402U Expired JPH0238442Y2 (enExample) 1984-09-20 1984-09-20

Country Status (1)

Country Link
JP (1) JPH0238442Y2 (enExample)

Also Published As

Publication number Publication date
JPS6157515U (enExample) 1986-04-17

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