JPH0238437Y2 - - Google Patents
Info
- Publication number
- JPH0238437Y2 JPH0238437Y2 JP9443686U JP9443686U JPH0238437Y2 JP H0238437 Y2 JPH0238437 Y2 JP H0238437Y2 JP 9443686 U JP9443686 U JP 9443686U JP 9443686 U JP9443686 U JP 9443686U JP H0238437 Y2 JPH0238437 Y2 JP H0238437Y2
- Authority
- JP
- Japan
- Prior art keywords
- resist
- shaft
- spinner
- brush
- cleaning liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004140 cleaning Methods 0.000 claims description 36
- 239000007788 liquid Substances 0.000 claims description 21
- 235000012431 wafers Nutrition 0.000 description 5
- 238000000576 coating method Methods 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 3
- 239000012530 fluid Substances 0.000 description 3
- 230000001680 brushing effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 230000002195 synergetic effect Effects 0.000 description 1
Landscapes
- Cleaning In General (AREA)
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9443686U JPH0238437Y2 (en, 2012) | 1986-06-19 | 1986-06-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9443686U JPH0238437Y2 (en, 2012) | 1986-06-19 | 1986-06-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS631326U JPS631326U (en, 2012) | 1988-01-07 |
| JPH0238437Y2 true JPH0238437Y2 (en, 2012) | 1990-10-17 |
Family
ID=30957896
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9443686U Expired JPH0238437Y2 (en, 2012) | 1986-06-19 | 1986-06-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0238437Y2 (en, 2012) |
-
1986
- 1986-06-19 JP JP9443686U patent/JPH0238437Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS631326U (en, 2012) | 1988-01-07 |
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