JPH0238349B2 - - Google Patents

Info

Publication number
JPH0238349B2
JPH0238349B2 JP55142510A JP14251080A JPH0238349B2 JP H0238349 B2 JPH0238349 B2 JP H0238349B2 JP 55142510 A JP55142510 A JP 55142510A JP 14251080 A JP14251080 A JP 14251080A JP H0238349 B2 JPH0238349 B2 JP H0238349B2
Authority
JP
Japan
Prior art keywords
polishing
discharge
liquid
polishing liquid
discharge gutter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP55142510A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5766860A (en
Inventor
Hatsuyuki Arai
Seiichi Maeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Speedfam Corp
Original Assignee
Speedfam Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Speedfam Corp filed Critical Speedfam Corp
Priority to JP55142510A priority Critical patent/JPS5766860A/ja
Publication of JPS5766860A publication Critical patent/JPS5766860A/ja
Publication of JPH0238349B2 publication Critical patent/JPH0238349B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
JP55142510A 1980-10-14 1980-10-14 Abrasive liquid selector device Granted JPS5766860A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55142510A JPS5766860A (en) 1980-10-14 1980-10-14 Abrasive liquid selector device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55142510A JPS5766860A (en) 1980-10-14 1980-10-14 Abrasive liquid selector device

Publications (2)

Publication Number Publication Date
JPS5766860A JPS5766860A (en) 1982-04-23
JPH0238349B2 true JPH0238349B2 (OSRAM) 1990-08-30

Family

ID=15317023

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55142510A Granted JPS5766860A (en) 1980-10-14 1980-10-14 Abrasive liquid selector device

Country Status (1)

Country Link
JP (1) JPS5766860A (OSRAM)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6190867A (ja) * 1984-10-05 1986-05-09 Naoetsu Denshi Kogyo Kk ウェーハの研磨方法
JP4589357B2 (ja) * 2007-04-16 2010-12-01 株式会社荏原製作所 ポリッシング装置
JP7019184B2 (ja) 2018-07-17 2022-02-15 スピードファム株式会社 処理液切換装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5457294A (en) * 1977-10-15 1979-05-08 Shibayama Kikai Kk Method of separating slurry wash liquid in polishing machine

Also Published As

Publication number Publication date
JPS5766860A (en) 1982-04-23

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