JPH0236978A - Thin film printing method - Google Patents

Abstract

PURPOSE:To print a thin film used for electronic component parts with a uniform and accurate thickness in a required pattern form in an easy manner by a method wherein an ink containing a metallic compound is loaded on a specific recessed plate and, thereafter, a plate cylinder is depressed against the surface of a body to be printed to form a thin film thereon. CONSTITUTION:A small hole 1 has a depth of 3-50mum, an open part average diameter of 1-500mum, an open part area of 1-80%, a total recessed part capacities per 1cm<2> of 0.05-5mm<3>, and an average minimum distance of 10-2,000mum between the small holes 1. The use of a recessed plate 2 provided with the small holes 1 in the above ranges can form a uniform thin film 6. For example, a plate cylinder 4 is depressed against the surface of the recessed plate 2, whereby an ink is transferred to the surface of a projected plate 3. Thereafter, the plate cylinder 4 is depressed against the surface of a body to be printed 5 such as a glass plate, whereby a thin film 6 is formed on the surface of the body to be printed 5.

Description

[Detailed description of the invention] [Industrial application field]

The present invention relates to a thin film printing method, and more specifically, it is aimed at easily printing a thin film used for electronic components into a desired pattern shape with a uniform and accurate film thickness.

[Conventional technology]

In recent years, polymer thin films and metal oxide thin films have been required and used in various electronic components, such as insulating films for semiconductor devices and alignment films for liquid crystal display devices. These thin films are generally used with a thickness of 0.01 to 0.3 μm, but
Uniformity of the film thickness and accuracy of pattern shape and dimensions are strictly required. Conventionally, a printing method has been considered as a method for forming the thin film (for example, see Japanese Patent Application Laid-Open No. 5537314). This method uses an offset proofing machine used in lithographic offset printing, and uses a blank cylinder equipped with a letterpress to print on a printing medium with a smooth surface such as a glass plate.A polymer solution is used as printing ink. This is a method of printing and forming a film.

[Problem to be solved by the invention]

However, this method has the following drawbacks. That is, the polymer solution used for this purpose has a viscosity of 10
Since the solution has a very low viscosity of ~2000 cps, it is difficult to obtain a sufficiently uniform film thickness when printing using an offset proofing machine. Furthermore, it has been difficult to stably print a thin film with a desired thickness. Because Offsela [・
The proofing machine uses a one-call kneading method to knead and spread the ink, but because it uses a polymer solution with a very low viscosity and low stickiness compared to general offset printing ink. It is not possible to spread the color uniformly because it is not kneaded uniformly and the ink does not flow out from the gap between each coil.Furthermore, it is difficult to supply the ink quantitatively and consistently to the roll. This is because it is not possible to develop a quantitatively stable color.

[Means for Solving the Problems] The present inventors have conducted various research studies in order to solve the problems of uniformity, quantification, and stabilization of film thickness in the conventional methods, and as a result, the present invention has been developed. This is what we have come to complete. That is, the present invention has a depth of 3 to 50 μm, an average opening diameter of 1 to 500 μm, an opening area of 1 to 80%, and a 1c
Total concave volume of small holes per ffl is 0.05 to 5 mm
”, an intaglio plate with small hole groups with the average shortest distance between the small holes of 10 to 2000/7 m on the entire surface or in necessary parts, made of a resin or resin precursor with a viscosity of 10 to 2000 cps and a solvent. After being filled with ink or ink containing a metal compound that forms a metal oxide when heated, the plate cylinder having a letterpress plate on its side having a smooth top surface is pressed against the intaglio plate surface, and the ink is applied to the letterpress plate surface. metastasized to
This thin film printing method is characterized in that the plate cylinder and the surface of the printing medium are then brought into pressure contact to form vRfil on the surface of the printing medium. Hereinafter, the present invention will be explained in more detail based on the drawings. FIG. 1, FIG. 2, and FIG. 3 are schematic cross-sectional views showing each step of the thin film printing method according to the present invention. 1 is a small hole, 2 is an intaglio plate, 3 is a letterpress plate, 4 is a plate cylinder, 5 is a printing medium, and 6 is a thin film. First, the intaglio plate 2 is filled with ink made of a low-viscosity resin or resin precursor and a solvent for forming the thin film 6 . The ink used has a relatively low viscosity, with a viscosity of 10 to 2000 c p =. Resins or resin precursors that can be used refer to thermoplastic resins or thermosetting resin precursors. Cured resin precursors for thermosetting and photocurable resins include phenol resins, melamine resins, urea resins, isocyanurate-1 resins, unsaturated polyester resins, alkyd resins, ebogishi resins, urethane resins, silicone resins, and crosslinked polyethylene. and unvulcanized rubber. Examples of thermoplastic resins include polyester, polyamide, polyimide, polyvinyl chloride, polyvinylidene chloride, polyvinyl acetate, borisnarene, polyvinylpyridone, polyvinyl alcohol, polyhinyl butyral, polycarbonate, polysulfone, polyether ester, polyether sulfone, and polyvinyl pyridone. Acrylate, polymethyl methacrylate! ·and so on. The above-mentioned resins, resin precursors, or mixtures thereof can be used in the present invention, but since the viscosity of the ink is specified, resins with too high a molecular weight are not suitable for the purpose of being able to be dissolved in a solvent. is inappropriate;
The oligomer or polymer must be used to the extent that it can be formed into an ink. Metal compounds that form metal oxides when heated include mineral salts of cadmium, indium, tin, antimony, etc. alone or in combination of two or more, halides, inorganic compounds such as oxides, or organic acids. Salts, alkoxy compounds, organic chelate compounds or mixtures thereof can be used. The intaglio plate 2 has many small holes 1 all over its surface or in necessary parts.
(See Figure 1). This group of small holes is called a cell in the printing industry, and the shape of the small holes may be an inverted pyramid shape, etc., and the arrangement type may be a lattice shape, a diagonal shape, etc., and is appropriately selected. The depth of small hole 1 is 3 to 50 μm, and the average diameter of the opening is 1 to 5 μm.
00 μm 1 opening area is 1 to 80%, the total recess volume per cffl is 0.05 to 5 mm 3 , and the average shortest distance between small holes 1 is 10 to 2000 μm. This specification is made in order to form a thin film 6 of uniform thickness. In other words, if the small hole 1 has a value larger than each of the above ranges, the amount of ink filled into the intaglio 2 is too large, and the intaglio 3 is filled with too much ink.
When the ink is brought into pressure contact with the surface of the printing material 5, the ink protrudes around the relief plate 3, and as a result, the thickness of the thin film 6 formed on the surface of the printing material 5 is not constant. Furthermore, if the small holes 1 are smaller than the above range, the amount of ink filled and transferred is too small, so that the ink transferred from each small hole 1 is transferred independently to the surface of the printing material 5. Therefore, it is not possible to form a continuous thin film 6 of uniform thickness. Therefore, by using the intaglio plate 2 in which the small holes 1 in the various ranges described above are formed, a uniform thin film 6 can be formed. A thin film is formed by selecting and using an intaglio plate 2 that has the depth of the small holes 1, the average diameter of the openings, the opening area, the total concave volume of the small holes 1, and the average shortest distance between the small holes 1. 6 thickness can be adjusted. Furthermore, if the thin film 6 to be formed has a pattern, a group of small holes will be formed in necessary portions corresponding to the pattern. Furthermore, if an intaglio plate 2 in which at least one of the depth of the small holes 1, the average diameter of the openings, and the area of the openings are partially different is used, thin films 6 designed to have partially different thicknesses can be printed. be able to. Note that when filling the intaglio plate 2 with ink, a more accurate amount of ink can be supplied by using a doctor or the like. Note that the intaglio plate 2 may be provided with a group of grooves of appropriate length instead of one group of small holes. In this case, the depth of the groove is 3
~50μm, average width of openings 1~500μm, opening area 5~80%, total recess volume per 1c+fl 0
．． 05-5mm3, average distance between grooves 1-1000μm
It is. Next, the plate cylinder 4 is pressed against the surface of the intaglio plate 2 (see Figure 2).
. A relief plate 3 is provided on the side surface of the plate cylinder 4. The relief plate 3 is made of, for example, rubber such as butyl rubber or resin such as nylon resin. Alternatively, it may be made of photosensitive resin or photosensitive rubber. The surface roughness preferably has a smoothness of JIS standard Rz 50 μm or more. The relief plate 3 is constructed so as to exhibit the pattern of the thin film 6 to be formed, but if the group of small holes of the intaglio plate 2 is formed in a pattern, it does not necessarily have to be the same as the pattern. Note that the thickness of the relief plate 3 is preferably about 0.3 to 2.0 mm. The ink is transferred to the surface of the relief plate 3 by this pressure contact. Thereafter, by pressing the plate cylinder 4 against the surface of the printing material 5 such as a glass plate, a thin film 6 is formed on the surface of the printing material 5 (third
(see figure). Since the present invention is an 'ai film printing method as described above, even if the ink is filled into the intaglio plate 2 with low viscosity ink,
Since it can be carried out accurately and stably, a thin film 6 of uniform thickness can be easily formed, and an accurate film j7 can be stably obtained. Further, the dimensional accuracy of the desired pattern shape can also be accurately obtained. Therefore, it is expected that it will be widely used to form thin films 6 for various electronic components. [Example] The present invention will be explained in detail below. Semicofine 5p-510 (trade name) manufactured by Shishi Plaska Kamitoshi ■ was diluted with N-methyl-2-pyrrolidone to a resin content of 8 and a viscosity of 80.
cps is used as the ink, and as an intaglio,
Depth 35 μm, average opening diameter 60 μm, opening area 10
%, a gravure plate having a group of small holes on the entire surface with a recess volume of about 0.2 mm3 per 1c+fl was used. After filling the small pores with ink and scraping off the excess ink from the surface with a steel doctor blade, a butyl rubber plate cylinder with a smooth surface is pressed against the top of the convex part, and a polymer is applied to the top of the convex part. A fixed amount of the solution is transferred, and the protrusions are pressed against the surface of a liquid crystal display glass plate to be printed, thereby printing a polymer thin film in accordance with the protrusion pattern.
After heating and drying, heat treatment was performed for imitation. The thickness of the completed polyimide film is 0.07-0.08
The film was sufficiently uniform in the μm range, and after being assembled into a liquid crystal panel and subjected to characteristic tests and forced life tests, it was found to be extremely excellent as a liquid crystal alignment film. Jitsunen I Semico Fine 5P-710 (product name) made by Toshi ■N
An ink diluted with methyl-2-pyrrolidone to give a resin content of 5% and a viscosity of 25 cps was used as an intaglio plate, with a depth of 30 μm, an average opening diameter, and an opening area of 4 (Ju m 4.5%). , 601Jm10.0
%, 80μm・17.5%, recess volume per ICll is approximately 0.1mm3, approximately 0.2Ll1m3, approximately 0
．． Three types of small hole groups of 35 mm3 were provided in necessary areas. After filling the three types of small pore groups with ink and scraping off the excess polymer solution with a steel blade, the Asahi Kasei ■ A plate cylinder with -50 (trade name) affixed to the manufactured APII. Three types of polymer thin films with different thicknesses were printed in pressure contact with the surface of a display glass plate in accordance with the convex pattern, and after heating and drying, heat treatment was performed for imidization. The film thickness of the completed polyimide film is 0.03
~0.04μm, 0.05~0.06μm, 0.08
Three types of film thicknesses of ~0.09 μm were made sufficiently uniformly in the necessary areas, and after assembling the liquid crystal panel,
As a result of performance tests, it was possible to obtain display panels in one liquid crystal panel having three types of characteristics with different driving voltages depending on the thickness of the alignment film. Implementation ■1 As an intaglio, a nylon-based photosensitive letterpress plate having the same pattern as the transparent electrode pattern formed on the liquid crystal display glass plate to be printed under the same conditions as in Example 1, Toshi ■ Treleaf 1, F-95N ( Example 1
Using the same ink as above, printing was performed in register only on the transparent electrode formed on a glass plate for liquid crystal display using the same method, and after heating and drying, heat treatment was performed for imidization. The polyimide film formed only on the completed transparent electrode was sufficiently uniform with a thickness in the range of 0.07 to 0.08 μm, and after assembling it as a liquid crystal panel, quality evaluation was performed and it was found to be extremely excellent. I was able to confirm that it was.

[Brief explanation of the drawing]

FIG. 1, FIG. 2, and FIG. 3 are schematic cross-sectional views showing each step of the thin film printing method according to the present invention. 1... Small hole, 2... Intaglio, 3... Letterpress, 4...
Plate cylinder, 5... printing material, 6... thin film. Patent applicant LI Hon Photo Printing Co., Ltd.

Claims (1)

[Claims] 1. The depth is 3 to 50 μm, and the average diameter of the opening is 1 to 500 μm.
μm, the opening area is 1 to 80%, the total concave volume of the small holes per 1 cm^2 is 0.05 to 5 mm^3, and the average shortest distance between the small holes is 10 to 2000 μm. The intaglio plate provided on the entire surface or in the necessary parts has a viscosity of 10 to 20
After being filled with an ink made of 00 cps of resin or a resin precursor and a solvent, or an ink containing a metal compound that forms a metal oxide when heated, a plate cylinder having a letterpress plate having a smooth top surface on the side surface and the intaglio plate. 1. A thin film printing method comprising the steps of: transferring the ink to the surface of the relief printing plate; and then pressing the plate cylinder and the surface of the printing material to form a thin film on the surface of the printing material. 2. Provide a group of small holes in which at least one of the following is partially different: the depth of the small holes, the average diameter of the openings, the opening area, the total concave volume of the small holes per unit area, and the average shortest distance between the small holes. The thin film printing method according to claim 1, characterized in that an intaglio plate is used. 3. The thin film printing method according to claim 1, wherein the relief plate provided on the side surface of the printing cylinder is made of butyl rubber. 4. The thin film printing method according to claim 1, wherein the relief plate provided on the side surface of the printing cylinder is made of nylon resin. 5. The thin film printing method according to claim 1, wherein the relief plate provided on the side surface of the printing cylinder is made of a photosensitive resin. 6. The thin film printing method according to claim 1, wherein the relief plate provided on the side surface of the printing cylinder is made of photosensitive rubber. 7 Depth is 3 to 50 μm, average width of opening is 1 to 500 μm
μm, the opening area is 5 to 80%, the total recessed volume of the grooves per 1 cm^2 is 0.05 to 5 mm^3, and the average distance between the grooves is 1 to 1000 μm. A thin film printing method according to claim 1, characterized in that the thin film printing method is used.