JPH0235242B2 - - Google Patents
Info
- Publication number
- JPH0235242B2 JPH0235242B2 JP58118622A JP11862283A JPH0235242B2 JP H0235242 B2 JPH0235242 B2 JP H0235242B2 JP 58118622 A JP58118622 A JP 58118622A JP 11862283 A JP11862283 A JP 11862283A JP H0235242 B2 JPH0235242 B2 JP H0235242B2
- Authority
- JP
- Japan
- Prior art keywords
- moving object
- end position
- roller
- moving
- position information
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000012545 processing Methods 0.000 claims description 28
- 238000003384 imaging method Methods 0.000 claims description 14
- 238000001514 detection method Methods 0.000 claims description 13
- 230000007246 mechanism Effects 0.000 claims description 12
- 238000005070 sampling Methods 0.000 claims description 9
- 238000000034 method Methods 0.000 claims description 7
- 230000008569 process Effects 0.000 claims description 6
- 230000001105 regulatory effect Effects 0.000 claims description 6
- 230000002950 deficient Effects 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 2
- 230000003287 optical effect Effects 0.000 description 14
- 238000005259 measurement Methods 0.000 description 12
- 238000010586 diagram Methods 0.000 description 8
- 238000005286 illumination Methods 0.000 description 4
- 238000012937 correction Methods 0.000 description 3
- 238000009825 accumulation Methods 0.000 description 2
- 238000013459 approach Methods 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- FFBHFFJDDLITSX-UHFFFAOYSA-N benzyl N-[2-hydroxy-4-(3-oxomorpholin-4-yl)phenyl]carbamate Chemical compound OC1=C(NC(=O)OCC2=CC=CC=C2)C=CC(=C1)N1CCOCC1=O FFBHFFJDDLITSX-UHFFFAOYSA-N 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/024—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by means of diode-array scanning
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11862283A JPS6010107A (ja) | 1983-06-29 | 1983-06-29 | 物体選別装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11862283A JPS6010107A (ja) | 1983-06-29 | 1983-06-29 | 物体選別装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6010107A JPS6010107A (ja) | 1985-01-19 |
| JPH0235242B2 true JPH0235242B2 (zh) | 1990-08-09 |
Family
ID=14741085
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11862283A Granted JPS6010107A (ja) | 1983-06-29 | 1983-06-29 | 物体選別装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6010107A (zh) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN86104429A (zh) * | 1985-07-05 | 1987-01-07 | 西屋电气公司 | 溅射镀膜设备的靶中阴极和接地屏蔽极的配置 |
| JPS63467A (ja) * | 1986-06-18 | 1988-01-05 | Fujitsu Ltd | スパツタタ−ゲツト |
| JPH034111A (ja) * | 1989-05-31 | 1991-01-10 | Toshiba Chem Corp | 長さ測定装置および長さ測定選別装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5583803A (en) * | 1978-12-20 | 1980-06-24 | Toshiba Corp | Dimension measuring unit |
-
1983
- 1983-06-29 JP JP11862283A patent/JPS6010107A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5583803A (en) * | 1978-12-20 | 1980-06-24 | Toshiba Corp | Dimension measuring unit |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6010107A (ja) | 1985-01-19 |
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