JPH0234145B2 - - Google Patents
Info
- Publication number
- JPH0234145B2 JPH0234145B2 JP60045987A JP4598785A JPH0234145B2 JP H0234145 B2 JPH0234145 B2 JP H0234145B2 JP 60045987 A JP60045987 A JP 60045987A JP 4598785 A JP4598785 A JP 4598785A JP H0234145 B2 JPH0234145 B2 JP H0234145B2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- sample holder
- optical axis
- lever
- force
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000003287 optical effect Effects 0.000 claims description 24
- 210000000078 claw Anatomy 0.000 description 9
- 229910000831 Steel Inorganic materials 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 239000010959 steel Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60045987A JPS61206147A (ja) | 1985-03-08 | 1985-03-08 | 電子顕微鏡用試料交換装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60045987A JPS61206147A (ja) | 1985-03-08 | 1985-03-08 | 電子顕微鏡用試料交換装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61206147A JPS61206147A (ja) | 1986-09-12 |
| JPH0234145B2 true JPH0234145B2 (cs) | 1990-08-01 |
Family
ID=12734502
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60045987A Granted JPS61206147A (ja) | 1985-03-08 | 1985-03-08 | 電子顕微鏡用試料交換装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61206147A (cs) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4581824B2 (ja) * | 2005-05-06 | 2010-11-17 | 株式会社島津製作所 | 粒子線顕微鏡、及び真空分析装置用部材移動機構 |
-
1985
- 1985-03-08 JP JP60045987A patent/JPS61206147A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61206147A (ja) | 1986-09-12 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4992660A (en) | Scanning tunneling microscope | |
| EP1443541A2 (en) | Method for the manufacture and transmissive irradiation of a sample, and particle-optical system | |
| WO2014013709A1 (ja) | 試料ホルダー先端部、及び前記試料ホルダー先端部を有する試料ホルダー、並びにゴニオステージ、及び当該ゴニオステージを有する電子顕微鏡 | |
| JPH0234145B2 (cs) | ||
| JP3942318B2 (ja) | 基板保持機構 | |
| JPH0243091Y2 (cs) | ||
| JPH02181351A (ja) | 電子顕微鏡用バルク試料ホールダ | |
| JP2005026530A (ja) | 試料ホルダ移動機構及び真空装置並びに荷電粒子ビーム装置 | |
| JP7547630B2 (ja) | 試料ホルダおよび解析システム | |
| JP3652144B2 (ja) | プローブ装置 | |
| JPH08201641A (ja) | 融着接続機の光ファイバクランプ機構 | |
| JPWO2022244055A5 (cs) | ||
| JP3950610B2 (ja) | 走査形プローブ顕微鏡 | |
| JP2010243838A (ja) | 顕微鏡装置 | |
| JP2002334677A (ja) | 試料交換装置 | |
| JPH0227495Y2 (cs) | ||
| JPH0357000Y2 (cs) | ||
| JPS6298545A (ja) | 透過形電子顕微鏡の試料微動装置 | |
| JP4642488B2 (ja) | ゲートバルブ | |
| JPH0447890Y2 (cs) | ||
| JPH0335103A (ja) | 走査形トンネル顕微鏡 | |
| JPH0143858Y2 (cs) | ||
| JPS594440Y2 (ja) | 電子的分析装置の対物絞り等の交換装置 | |
| JPS6334208Y2 (cs) | ||
| JP2024042583A (ja) | 試料ホルダー把持装置、試料ホルダー交換装置、及び、試料ホルダー交換方法 |