JPH0233255U - - Google Patents
Info
- Publication number
- JPH0233255U JPH0233255U JP11043488U JP11043488U JPH0233255U JP H0233255 U JPH0233255 U JP H0233255U JP 11043488 U JP11043488 U JP 11043488U JP 11043488 U JP11043488 U JP 11043488U JP H0233255 U JPH0233255 U JP H0233255U
- Authority
- JP
- Japan
- Prior art keywords
- substrate mounting
- evaporation source
- mounting plate
- substrate
- mounting jig
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims 6
- 238000000151 deposition Methods 0.000 claims 2
- 230000008020 evaporation Effects 0.000 claims 2
- 238000001704 evaporation Methods 0.000 claims 2
- 230000008021 deposition Effects 0.000 claims 1
- 230000002441 reversible effect Effects 0.000 claims 1
- 238000007740 vapor deposition Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図は、本考案で用いられる基板取付け治具
を示す斜視図である。第２図は、本考案の両面蒸
着装置の実施例を示す縦断面図である。第３図は
本考案における蒸着の状態を示す説明図、第４図
は従来例における蒸着の状態を示す説明図である
。第５図は、膜厚分布の説明図である。第６図は
、従来例の基板取付け板を示す斜視図である。第
７図は、従来例の基板取付け治具を示す斜視図で
ある。
１１……基板取付け板、１３……保持マスク板
、１５……反転用係合片、１７……支承軸、１９
……回転子、２１……ヒンジ、２３……固定子、
２９……レンズ、３１……基板取付け治具受け、
３３……受板、４１……アクチユエータ、４５…
…回転軸、４７……チエーン、４９，７１……駆
動歯車、５７……蒸着源、５９……膜厚補正板。
FIG. 1 is a perspective view showing a board mounting jig used in the present invention. FIG. 2 is a longitudinal sectional view showing an embodiment of the double-sided vapor deposition apparatus of the present invention. FIG. 3 is an explanatory diagram showing the state of vapor deposition in the present invention, and FIG. 4 is an explanatory diagram showing the state of vapor deposition in the conventional example. FIG. 5 is an explanatory diagram of film thickness distribution. FIG. 6 is a perspective view showing a conventional board mounting plate. FIG. 7 is a perspective view showing a conventional board mounting jig. 11... Board mounting plate, 13... Holding mask plate, 15... Engaging piece for reversal, 17... Support shaft, 19
... rotor, 21 ... hinge, 23 ... stator,
29... Lens, 31... Board mounting jig holder,
33...Socket plate, 41...Actuator, 45...
... Rotating shaft, 47 ... Chain, 49, 71 ... Drive gear, 57 ... Vapor deposition source, 59 ... Film thickness correction plate.
Claims (1)
治具を設け、この基板取付け治具を複数の基板取
付け板に分割するとともに、基板取付け板を蒸着
源に対して反転可能とし、基板取付け板に保持さ
れた基板の両面を順次蒸着可能とした両面蒸着装
置において、前記基板取付け板を水平に配設した
ことを特徴とする両面蒸着装置。 A substrate mounting jig that rotates horizontally is provided above the evaporation source, and this substrate mounting jig is divided into a plurality of substrate mounting plates, and the substrate mounting plate is made reversible relative to the evaporation source. What is claimed is: 1. A double-sided deposition apparatus capable of successively depositing vapor on both sides of a held substrate, characterized in that the substrate mounting plate is disposed horizontally.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11043488U JPH0233255U (en) | 1988-08-22 | 1988-08-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11043488U JPH0233255U (en) | 1988-08-22 | 1988-08-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0233255U true JPH0233255U (en) | 1990-03-01 |
Family
ID=31347590
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11043488U Pending JPH0233255U (en) | 1988-08-22 | 1988-08-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0233255U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5231318U (en) * | 1975-08-26 | 1977-03-04 |
-
1988
- 1988-08-22 JP JP11043488U patent/JPH0233255U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5231318U (en) * | 1975-08-26 | 1977-03-04 |
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