JPS6075457U - Continuous film deposition equipment - Google Patents
Continuous film deposition equipmentInfo
- Publication number
- JPS6075457U JPS6075457U JP16473983U JP16473983U JPS6075457U JP S6075457 U JPS6075457 U JP S6075457U JP 16473983 U JP16473983 U JP 16473983U JP 16473983 U JP16473983 U JP 16473983U JP S6075457 U JPS6075457 U JP S6075457U
- Authority
- JP
- Japan
- Prior art keywords
- continuous film
- film deposition
- deposition equipment
- forming apparatus
- film forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Physical Vapour Deposition (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は従来の連続成膜装置の説明図、第２図は第１図
のＡ−Ａ’断面図、第３図は本考案の一実施例を示すも
ので第２図に対応する断面図である。
１・・・基板、２・・・マスク、３，３′・・・テンシ
ョンリール、４・・・背当部、５・・・蒸着又はスパッ
タ源、６・・・回転軸部、δ・・・基板、マスク間の間
隙、θ・・・回転角。Fig. 1 is an explanatory diagram of a conventional continuous film forming apparatus, Fig. 2 is a cross-sectional view taken along the line AA' in Fig. 1, and Fig. 3 is a cross-sectional view corresponding to Fig. 2, showing an embodiment of the present invention. It is a diagram. DESCRIPTION OF SYMBOLS 1... Substrate, 2... Mask, 3, 3'... Tension reel, 4... Back support part, 5... Evaporation or sputtering source, 6... Rotating shaft part, δ...・Gap between substrate and mask, θ...rotation angle.
Claims (1)
有し、下方に物理的又は化学的蒸着源を有する連続成膜
装置に於て、前記背当部に揺動機構を持たせたことを特
徴とする連続成膜装置。In a continuous film forming apparatus having a substrate and a back rest of a mask in close contact with the substrate above, and a physical or chemical vapor deposition source below, the back rest has a swinging mechanism. A continuous film forming apparatus characterized by the following.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16473983U JPS6075457U (en) | 1983-10-26 | 1983-10-26 | Continuous film deposition equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16473983U JPS6075457U (en) | 1983-10-26 | 1983-10-26 | Continuous film deposition equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6075457U true JPS6075457U (en) | 1985-05-27 |
Family
ID=30361101
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16473983U Pending JPS6075457U (en) | 1983-10-26 | 1983-10-26 | Continuous film deposition equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6075457U (en) |
-
1983
- 1983-10-26 JP JP16473983U patent/JPS6075457U/en active Pending
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