JPH0338356U - - Google Patents
Info
- Publication number
- JPH0338356U JPH0338356U JP9650389U JP9650389U JPH0338356U JP H0338356 U JPH0338356 U JP H0338356U JP 9650389 U JP9650389 U JP 9650389U JP 9650389 U JP9650389 U JP 9650389U JP H0338356 U JPH0338356 U JP H0338356U
- Authority
- JP
- Japan
- Prior art keywords
- correction plate
- film thickness
- showing
- view
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001704 evaporation Methods 0.000 claims description 2
- 230000008020 evaporation Effects 0.000 claims description 2
- 238000007738 vacuum evaporation Methods 0.000 claims description 2
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図は膜厚補正板回転装置を有する真空蒸着
装置の構成を示す断面図、第２図は本考案による
膜厚補正板回転装置の構成を示す側面図、第３図
は本考案による膜厚補正板回転装置の他の例の構
成を示す側面図、第４図および第５図は補正板の
停止位置を設定する装置を示す側面図、第６図は
コートドームの構成を示す斜視図、第７図は同じ
くその他の例を示す斜視図である。
１０……真空処理室、１１……ドーム、１２…
…補正板、１３……補正板支柱、１４……蒸発源
、１５……ドーム回転台、３１……パレツト枠、
４１……補正板ホルダー、４２……回転ノブ、５
１……回転軸、５２ａ，５２ｂ……ギヤ、６１…
…回転位置決めピン、６２……ストツパー、６３
……ストツパー。
FIG. 1 is a sectional view showing the configuration of a vacuum evaporation apparatus having a film thickness correction plate rotation device, FIG. 2 is a side view showing the structure of the film thickness correction plate rotation device according to the present invention, and FIG. A side view showing the configuration of another example of the thickness correction plate rotation device, FIGS. 4 and 5 are side views showing the device for setting the stop position of the correction plate, and FIG. 6 is a perspective view showing the structure of the court dome. , FIG. 7 is a perspective view showing another example. 10... Vacuum processing chamber, 11... Dome, 12...
... Correction plate, 13 ... Correction plate support, 14 ... Evaporation source, 15 ... Dome rotary table, 31 ... Pallet frame,
41...Correction plate holder, 42...Rotary knob, 5
1... Rotating shaft, 52a, 52b... Gear, 61...
...Rotation positioning pin, 62...Stopper, 63
...stopper.
Claims (1)
発源に対し正対する対向位置、および９０°回転
位置に回転可能に配置するようにしたことを特徴
とする膜厚補正板回転装置。 1. A film thickness correction plate rotating device in a vacuum evaporation apparatus, characterized in that the film thickness distribution correction plate is rotatably arranged at a position directly facing an evaporation source and at a 90° rotated position.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9650389U JPH0338356U (en) | 1989-08-18 | 1989-08-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9650389U JPH0338356U (en) | 1989-08-18 | 1989-08-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0338356U true JPH0338356U (en) | 1991-04-12 |
Family
ID=31645699
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9650389U Pending JPH0338356U (en) | 1989-08-18 | 1989-08-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0338356U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006312765A (en) * | 2005-05-09 | 2006-11-16 | Fujinon Sano Kk | Vacuum vapor deposition device |
-
1989
- 1989-08-18 JP JP9650389U patent/JPH0338356U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006312765A (en) * | 2005-05-09 | 2006-11-16 | Fujinon Sano Kk | Vacuum vapor deposition device |